NXE is a series of extreme ultraviolet lithography machines developed by ASML.

History

ASML has been developing the technologies required to bring extreme ultraviolet lithography machines into mass production since the 1980s. ASML intended of putting EUV into HVM by the late 1990s. A number of breakthroughs that only took place over the last decades enabled EUV to finally reach mass production capabilities. By 2006, ASML has two alpha demos out EUV tools which went to imec and the other to Albany (To a research center at the University of Albany in collaboration by New York State with IBM and ASML). ASML started shipping the first generation NXE machines in 2010. By 2017 ASML started shipping the first HVM systems.

See also

• EUVL