Editing dec/microarchitectures/alpha 21264 (section)

== Process Technology ==
{{see also|0.35 µm process}}
Alpha 21264 was manufactured on a [[0.35 µm process]] at DEC's own Hudson foundry. The process had a 0.35 µm drawn gate length and 0.25 µm effective channel length. The CMOS process had 3 metal layers. The chip allowed for a supply voltage of up to 2 V in order to limit the chips to a power limit of 72 W, although it was actually designed to reliably operate at up to 2.5 V.
codename	Alpha 21264 +
core count	1 +
designer	DEC +
first launched	February 1998 +
full page name	dec/microarchitectures/alpha 21264 +
instance of	microarchitecture +
instruction set architecture	Alpha +
manufacturer	DEC +, Intel + and Samsung +
microarchitecture type	CPU +
name	Alpha 21264 +
pipeline stages	6 +
process	350 nm (0.35 μm, 3.5e-4 mm) +