Editing intel/process

{{intel title|Process Technology}}
This article details details '''[[Intel]]'s [[Semiconductor Process Technology]]''' history for research and posterity. The table below shows the history of Intel's process scaling. Values were taken from various Intel documents including IDF presentations, ISSCC papers, and IEDM papers. Note that while a great deal of effort was put into ensuring the accuracy of the values; however some numbers vary to a small degree between Intel's own documents and therefore discrepancies may exist. [[SRAM]] bitcell areas refer to a high-density 6T bitcell with the exception of the very first few processes where smaller cell designs were used. Additionally, the metal layer count is for the client dies (example consumer mobile & desktop); server models utilize considerably more layers.

== Timeline ==
[[File:intel 1micron yield.png|right|300px|thumb|[[1 µm]] vs [[500 nm]] yield]]
[[File:intel tech ramps 1um to 65nm.png|right|300px|thumb|Ramps from [[1 µm]] to [[65 nm]]]]
[[File:intel roadmap past 180nm.png|right|300px|thumb|Roadmap past [[180 nm]]]]
[[File:intel sram tests 130nm to 45nm.png|right|300px|thumb|SRAM test chips from [[130 nm]] to [[45 nm]]]]
[[File:intel fab roadmap from 2003.png|300px|thumb|Intel's fab roadmap from 2003. Intel had to switch to FinFET after gate length scaling stalled due to subpar electrical characteristics.]]
[[File:intel sram density scaling.png|300px|thumb|[[65 nm]] to [[32 nm]] SRAM scaling]]
[[File:intel 90nm 32nm yield.png|300px|thumb|[[90 nm]] to [[32 nm]]]]
[[File:intel scaling from 45nm to 10nm.png|300px|thumb|Intel scaling from [[45 nm]] to [[10 nm]]]]
<div style="overflow-x: scroll; white-space: nowrap;">
<table class="wikitable" style="text-align: center;">
<tr><th>Year</th><th>Process</th><th>Node</th><th>MLayers</th><th>µarchs</th><th>Gate</th><th>Interconnects</th><th colspan="4">Attributes</th></tr>
{{intel proc tech |year=1977 |name=CHMOS I |mlayers=1 |node=3 µm
  |archs=8085, 8086, 8088, 80186
  |a1=T<sub>ox</sub> |d1=70 nm     |a12=Gate Dielectric |d12=
  |a2=V<sub>dd</sub> |d2=5 V       |a22=SRAM            |d22= 1120 µm²
  |a3=L<sub>g</sub>  |d3=3.0 µm
  |a4=CPP            |d4=7 µm      |a42=MMP             |d42=11 µm
}}
{{intel proc tech |year=1979 |name=CHMOS II |mlayers=1 |node=2 µm
  |archs=
  |a1=T<sub>ox</sub> |d1=40 nm     |a12=Gate Dielectric |d12=
  |a2=V<sub>dd</sub> |d2=5 V       |a22=SRAM            |d22=1740 µm²
  |a3=L<sub>g</sub>  |d3=2.0 µm
  |a4=CPP            |d4=5.6 µm    |a42=MMP             |d42=8 µm
}}
{{intel proc tech |year=1982 |name=P646<br>(CHMOS III) |mlayers=1 |node=1.5 µm
  |archs=80286, 80386
  |a1=T<sub>ox</sub> |d1=25 nm     |a12=Gate Dielectric |d12=Si<sub>2</sub>N<sub>2</sub>O
  |a2=V<sub>dd</sub> |d2=5 V       |a22=SRAM            |d22=951.7 µm²
  |a3=L<sub>g</sub>  |d3=1.5 µm
  |a4=CPP            |d4=4.0 µm    |a42=MMP             |d42=6.4 µm
}}
{{intel proc tech |year=1987 |name=P648 |mlayers=2 |node=1.0 µm
  |archs=80486
  |a1=T<sub>ox</sub> |d1=          |a12=Gate Dielectric |d12=
  |a2=V<sub>dd</sub> |d2=4 V       |a22=SRAM            |d22=
  |a3=L<sub>g</sub>  |d3=1.0 µm
  |a4=CPP            |d4=          |a42=MMP             |d42=
}}
{{intel proc tech |year=1989 |name=P650 |mlayers=3 |node=0.8 µm
  |archs=80486
  |a1=T<sub>ox</sub> |d1=15 nm     |a12=Gate Dielectric |d12=
  |a2=V<sub>dd</sub> |d2=4 V       |a22=SRAM            |d22=111 µm²
  |a3=L<sub>g</sub>  |d3=800 µm
  |a4=CPP            |d4=1.7 µm    |a42=MMP             |d42=2 µm
}}
{{intel proc tech |year=1991 |name=P652 |mlayers=4 |node=0.6 µm
  |archs=80486, P5
  |a1=T<sub>ox</sub> |d1=8 nm      |a12=Gate Dielectric |d12=
  |a2=V<sub>dd</sub> |d2=3.3 V     |a22=SRAM            |d22=
  |a3=L<sub>g</sub>  |d3=600 µm
  |a4=CPP            |d4=          |a42=MMP             |d42=1.4 µm
}}
{{intel proc tech |year=1993 |name=P852 |mlayers=4 |node=0.5 µm
  |archs=P5
  |a1=L<sub>g</sub>  |d1=500 nm
  |a2=T<sub>ox</sub> |d2=8.0 nm |a22=Gate Dielectric |d22=
  |a3=V<sub>dd</sub> |d3=3.3 V
}}
{{intel proc tech |year=1995 |name=P854 |mlayers=4 |node=0.35 µm
  |archs=P6
  |a1=T<sub>ox</sub> |d1=6 nm     |a12=Gate Dielectric |d12=SiO<sub>2</sub>
  |a2=V<sub>dd</sub> |d2=2.5 V      |a22=SRAM            |d22=20.5 µm²
  |a3=L<sub>g</sub>  |d3=350 nm
  |a4=CPP            |d4=920 nm     |a42=MMP             |d42=880 nm
}}

{{intel proc tech |year=1997 |name=P856 |mlayers=5 |node=0.25 µm
  |archs=P6
  |a1=T<sub>ox</sub> |d1=4.08 nm     |a12=Gate Dielectric |d12=SiO<sub>2</sub>
  |a2=V<sub>dd</sub> |d2=1.8 V      |a22=SRAM            |d22=10.26 µm²
  |a3=L<sub>g</sub>  |d3=200 nm
  |a4=CPP            |d4=500 nm     |a42=MMP             |d42=640 nm
}}
{{intel proc tech |year=1998 |name=P856.5 |mlayers=5 |node=0.25 µm
  |archs=P6
  |a1=T<sub>ox</sub> |d1=4.08 nm     |a12=Gate Dielectric |d12=SiO<sub>2</sub>
  |a2=V<sub>dd</sub> |d2=1.8 V      |a22=SRAM            |d22=9.26 µm²
  |a3=L<sub>g</sub>  |d3=200 nm
  |a4=CPP            |d4=475 nm     |a42=MMP             |d42=608 nm
}}

{{intel proc tech |year=1999 |name=P858 |mlayers=6 |node=0.18 µm
  |archs=NetBurst
  |a1=T<sub>ox</sub> |d1=2.0 nm     |a12=Gate Dielectric |d12=SiO<sub>2</sub>
  |a2=V<sub>dd</sub> |d2=1.6 V      |a22=SRAM            |d22=5.59 µm²
  |a3=L<sub>g</sub>  |d3=130 nm
  |a4=CPP            |d4=480 nm     |a42=MMP             |d42=500 nm
}}
{{intel proc tech |year=2001 |name=P860 |mlayers=6 |node=0.13 µm
  |xtor img=intel 130nm gate.png
  |interconnects img=intel 130nm gate interconnect.png
  |archs=Pentium M
  |a1=T<sub>ox</sub> |d1=1.4 nm     |a12=Gate Dielectric |d12=SiO<sub>2</sub>
  |a2=V<sub>dd</sub> |d2=1.4 V      |a22=SRAM            |d22=2.45 µm²
  |a3=L<sub>g</sub>  |d3=70 nm
  |a4=CPP            |d4=336 nm     |a42=MMP             |d42=345 nm
}}
{{intel proc tech |year=2003 |name=P1262 |mlayers=7 |node=90 nm
  |xtor img=intel 90nm gate.png
  |interconnects img=intel_90nm_gate_interconnect.png
  |archs=Pentium M
  |a1=T<sub>ox</sub> |d1=1.2 nm     |a12=Gate Dielectric |d12=SiO<sub>2</sub>
  |a2=V<sub>dd</sub> |d2=1.2 V      |a22=SRAM            |d22=1.00 µm²
  |a3=L<sub>g</sub>  |d3=50 nm
  |a4=CPP            |d4=260 nm     |a42=MMP             |d42=220 nm
}}
{{intel proc tech |year=2005 |name=P1264 |mlayers=8 |node=65 nm
  |xtor img=intel 65nm gate.png
  |interconnects img=intel_65nm_gate_interconnect.png
  |archs=Core, Modified Pentium M
  |a1=T<sub>ox</sub> |d1=           |a12=Gate Dielectric |d12=SiO<sub>2</sub>
  |a2=V<sub>dd</sub> |d2=           |a22=SRAM            |d22=0.570 µm²
  |a3=L<sub>g</sub>  |d3=35 nm
  |a4=CPP            |d4=220 nm     |a42=MMP             |d42=210 nm
}}
{{intel proc tech |year=2007 |name=P1266 |mlayers=9 |node=45 nm
  |xtor img=intel 45nm gate.png
  |interconnects img=intel_45nm_gate_interconnects.png
  |archs=Penryn, Nehalem
  |a1=T<sub>ox</sub> |d1=           |a12=Gate Dielectric |d12=High-κ
  |a2=V<sub>dd</sub> |d2=           |a22=SRAM            |d22=0.346 µm²
  |a3=L<sub>g</sub>  |d3=25 nm
  |a4=CPP            |d4=160 nm     |a42=MMP             |d42=180 nm
}}
{{intel proc tech |year=2009 |name=P1268 |mlayers=10 |node=32 nm
  |xtor img=intel 32nm gate.png
  |interconnects img=intel 32nm gate interconnect.png
  |archs=Westmere, Sandy Bridge
  |a1=T<sub>ox</sub> |d1=           |a12=Gate Dielectric |d12=High-κ
  |a2=V<sub>dd</sub> |d2=0.75 V     |a22=SRAM            |d22=0.148 µm²
  |a3=L<sub>g</sub>  |d3=30 nm
  |a4=CPP            |d4=112.5 nm   |a42=MMP             |d42=112.5 nm
}}
{{intel proc tech |year=2011 |name=P1270 |mlayers=11 |node=22 nm
  |xtor img=intel 22nm gate.png
  |interconnects img=intel 22nm gate interconnect.png
  |archs=Ivy Bridge, Haswell
  |a1=T<sub>ox</sub> |d1=           |a12=Gate Dielectric |d12=High-κ
  |a2=V<sub>dd</sub> |d2=0.75 V     |a22=SRAM            |d22=0.092 µm²
  |a3=L<sub>g</sub>  |d3=26 nm
  |a4=CPP            |d4=90 nm      |a42=MMP             |d42=80 nm
}}
{{intel proc tech |year=2014 |name=P1272 |mlayers=11 |node=14 nm
  |xtor img=intel 14nm gate top.png
  |interconnects img=intel 14nm gate interconnect.png
  |archs=Broadwell, Skylake, Kaby Lake, Coffee Lake
  |a1=T<sub>ox</sub> |d1=           |a12=Gate Dielectric |d12=High-κ
  |a2=V<sub>dd</sub> |d2=           |a22=SRAM            |d22=0.0499 µm²
  |a3=L<sub>g</sub>  |d3=20 nm
  |a4=CPP            |d4=70 nm      |a42=MMP             |d42=52 nm
}}
{{intel proc tech |year=2017 |name=P1274 |mlayers= |node=10 nm
  |archs=Cannonlake, Icelake, Tigerlake
  |a1=T<sub>ox</sub> |d1=           |a12=Gate Dielectric |d12=High-κ
  |a2=V<sub>dd</sub> |d2=           |a22=SRAM            |d22=0.0312 µm²
  |a3=L<sub>g</sub>  |d3=18 nm ?
  |a4=CPP            |d4=54 nm      |a42=MMP             |d42=36 nm
}}
{{intel proc tech |year=2019 |name=P1276 |mlayers= |node=7 nm
}}
{{intel proc tech |year=2022 |name=P1278 |mlayers= |node=5 nm
}}
</table>
</div>