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{{intel title|Process Technology History}} | {{intel title|Process Technology History}} | ||
− | This article details '''[[Intel]]'s [[ | + | This article details '''[[Intel]]'s [[Semiconductor Process Technology]]''' history for research and posterity. |
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The table below shows the history of Intel's process scaling. Values were taken from various Intel documents including IDF presentations, ISSCC papers, and IEDM papers. Note that while a great deal of effort was put into ensuring the accuracy of the values, some numbers vary to a small degree between Intel's own documents and therefore discrepancies may exist. [[SRAM]] bitcell areas refer to a high-density 6T bitcell with the exception of the very first few processes where smaller cell designs were used. Additionally, the metal layer count is for the client dies (example consumer mobile & desktop); server models utilize considerably more layers. Finally, from the [[45 nm]] node, Intel has switched to utilizing a [[high-κ]] material, therefore the oxide thickness shown refers to the [[equivalent oxide thickness]] instead. | The table below shows the history of Intel's process scaling. Values were taken from various Intel documents including IDF presentations, ISSCC papers, and IEDM papers. Note that while a great deal of effort was put into ensuring the accuracy of the values, some numbers vary to a small degree between Intel's own documents and therefore discrepancies may exist. [[SRAM]] bitcell areas refer to a high-density 6T bitcell with the exception of the very first few processes where smaller cell designs were used. Additionally, the metal layer count is for the client dies (example consumer mobile & desktop); server models utilize considerably more layers. Finally, from the [[45 nm]] node, Intel has switched to utilizing a [[high-κ]] material, therefore the oxide thickness shown refers to the [[equivalent oxide thickness]] instead. | ||
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== Timeline == | == Timeline == | ||
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[[File:intel 90nm 32nm yield.png|250px|thumb|[[90 nm]] to [[32 nm]]]] | [[File:intel 90nm 32nm yield.png|250px|thumb|[[90 nm]] to [[32 nm]]]] | ||
[[File:intel scaling from 45nm to 10nm.png|250px|thumb|Intel scaling from [[45 nm]] to [[10 nm]]]] | [[File:intel scaling from 45nm to 10nm.png|250px|thumb|Intel scaling from [[45 nm]] to [[10 nm]]]] | ||
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<div style="overflow-x: scroll; white-space: nowrap; min-width: 300px" class="scrollable"> | <div style="overflow-x: scroll; white-space: nowrap; min-width: 300px" class="scrollable"> | ||
<table class="wikitable" style="text-align: center;"> | <table class="wikitable" style="text-align: center;"> | ||
<tr><th>Year</th><th>Process</th><th>[[technology node|Node]]</th><th>MLayers</th><th>µarchs</th><th>Gate</th><th>Interconnects</th><th colspan="4">Attributes</th></tr> | <tr><th>Year</th><th>Process</th><th>[[technology node|Node]]</th><th>MLayers</th><th>µarchs</th><th>Gate</th><th>Interconnects</th><th colspan="4">Attributes</th></tr> | ||
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{{intel proc tech |year=1977 |name=CHMOS I |mlayers=1 |node=3 µm | {{intel proc tech |year=1977 |name=CHMOS I |mlayers=1 |node=3 µm | ||
|archs=8085, 8086, 8088, 80186 | |archs=8085, 8086, 8088, 80186 | ||
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|a1=T<sub>ox</sub> |d1=15 nm |a12=Gate Dielectric |d12=SiO<sub>2</sub> | |a1=T<sub>ox</sub> |d1=15 nm |a12=Gate Dielectric |d12=SiO<sub>2</sub> | ||
|a2=V<sub>dd</sub> |d2=4 V |a22=SRAM |d22=111 µm² | |a2=V<sub>dd</sub> |d2=4 V |a22=SRAM |d22=111 µm² | ||
− | |a3=L<sub>g</sub> |d3=800 | + | |a3=L<sub>g</sub> |d3=800 µm |
|a4=CPP |d4=1.7 µm |a42=MMP |d42=2 µm | |a4=CPP |d4=1.7 µm |a42=MMP |d42=2 µm | ||
}} | }} | ||
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|a1=T<sub>ox</sub> |d1=8 nm |a12=Gate Dielectric |d12=SiO<sub>2</sub> | |a1=T<sub>ox</sub> |d1=8 nm |a12=Gate Dielectric |d12=SiO<sub>2</sub> | ||
|a2=V<sub>dd</sub> |d2=3.3 V |a22=SRAM |d22= | |a2=V<sub>dd</sub> |d2=3.3 V |a22=SRAM |d22= | ||
− | |a3=L<sub>g</sub> |d3=600 | + | |a3=L<sub>g</sub> |d3=600 µm |
|a4=CPP |d4= |a42=MMP |d42=1.4 µm | |a4=CPP |d4= |a42=MMP |d42=1.4 µm | ||
}} | }} | ||
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|a4=CPP |d4=336 nm |a42=MMP |d42=345 nm | |a4=CPP |d4=336 nm |a42=MMP |d42=345 nm | ||
}} | }} | ||
− | {{intel proc tech |year=2003 |name=P1262 | + | {{intel proc tech |year=2003 |name=P1262 |mlayers=7 |node=90 nm |
|xtor img=intel 90nm gate.png | |xtor img=intel 90nm gate.png | ||
|interconnects img=intel_90nm_gate_interconnect.png | |interconnects img=intel_90nm_gate_interconnect.png | ||
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|a4=CPP |d4=260 nm |a42=MMP |d42=220 nm | |a4=CPP |d4=260 nm |a42=MMP |d42=220 nm | ||
}} | }} | ||
− | {{intel proc tech |year=2005 |name=P1264 | + | {{intel proc tech |year=2005 |name=P1264 |mlayers=8 |node=65 nm |
|xtor img=intel 65nm gate.png | |xtor img=intel 65nm gate.png | ||
|interconnects img=intel_65nm_gate_interconnect.png | |interconnects img=intel_65nm_gate_interconnect.png | ||
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|a4=CPP |d4=220 nm |a42=MMP |d42=210 nm | |a4=CPP |d4=220 nm |a42=MMP |d42=210 nm | ||
}} | }} | ||
− | {{intel proc tech |year=2007 |name=P1266 | + | {{intel proc tech |year=2007 |name=P1266 |mlayers=9 |node=45 nm |
|xtor img=intel 45nm gate.png | |xtor img=intel 45nm gate.png | ||
|interconnects img=intel_45nm_gate_interconnects.png | |interconnects img=intel_45nm_gate_interconnects.png | ||
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|a4=CPP |d4=160 nm |a42=MMP |d42=180 nm | |a4=CPP |d4=160 nm |a42=MMP |d42=180 nm | ||
}} | }} | ||
− | {{intel proc tech |year=2009 |name=P1268 | + | {{intel proc tech |year=2009 |name=P1268 |mlayers=10 |node=32 nm |
|xtor img=intel 32nm gate.png | |xtor img=intel 32nm gate.png | ||
|interconnects img=intel 32nm gate interconnect.png | |interconnects img=intel 32nm gate interconnect.png | ||
|archs=Westmere, Sandy Bridge | |archs=Westmere, Sandy Bridge | ||
− | |a1=T<sub>oxe</sub>|d1= | + | |a1=T<sub>oxe</sub>|d1= |a12=Gate Dielectric |d12=High-κ |
|a2=V<sub>dd</sub> |d2=0.75 V |a22=SRAM |d22=0.148 µm² | |a2=V<sub>dd</sub> |d2=0.75 V |a22=SRAM |d22=0.148 µm² | ||
|a3=L<sub>g</sub> |d3=30 nm | |a3=L<sub>g</sub> |d3=30 nm | ||
|a4=CPP |d4=112.5 nm |a42=MMP |d42=112.5 nm | |a4=CPP |d4=112.5 nm |a42=MMP |d42=112.5 nm | ||
}} | }} | ||
− | {{intel proc tech |year=2011 |name=P1270 | + | {{intel proc tech |year=2011 |name=P1270 |mlayers=11 |node=22 nm |
|xtor img=intel 22nm gate.png | |xtor img=intel 22nm gate.png | ||
|interconnects img=intel 22nm gate interconnect.png | |interconnects img=intel 22nm gate interconnect.png | ||
|archs=Ivy Bridge, Haswell | |archs=Ivy Bridge, Haswell | ||
− | |a1=T<sub>oxe</sub>|d1= | + | |a1=T<sub>oxe</sub>|d1= |a12=Gate Dielectric |d12=High-κ |
|a2=V<sub>dd</sub> |d2=0.75 V |a22=SRAM |d22=0.092 µm² | |a2=V<sub>dd</sub> |d2=0.75 V |a22=SRAM |d22=0.092 µm² | ||
|a3=L<sub>g</sub> |d3=26 nm | |a3=L<sub>g</sub> |d3=26 nm | ||
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|a6=W<sub>''fin''</sub> |d6=8 nm |a62=H<sub>''fin''</sub> |d62=34 nm | |a6=W<sub>''fin''</sub> |d6=8 nm |a62=H<sub>''fin''</sub> |d62=34 nm | ||
}} | }} | ||
− | {{intel proc tech |year=2014 |name=P1272 | + | {{intel proc tech |year=2014 |name=P1272 |mlayers=11 |node=14 nm |
|xtor img=intel 14nm gate top.png | |xtor img=intel 14nm gate top.png | ||
|interconnects img=intel 14nm gate interconnect.png | |interconnects img=intel 14nm gate interconnect.png | ||
− | |archs=Broadwell, Skylake, Kaby Lake, Coffee | + | |archs=Broadwell, Skylake, Kaby Lake, Coffee Lake |
|a1=T<sub>oxe</sub>|d1= |a12=Gate Dielectric |d12=High-κ | |a1=T<sub>oxe</sub>|d1= |a12=Gate Dielectric |d12=High-κ | ||
|a2=V<sub>dd</sub> |d2=0.70 V |a22=SRAM |d22=0.0499 µm² | |a2=V<sub>dd</sub> |d2=0.70 V |a22=SRAM |d22=0.0499 µm² | ||
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|a4=CPP |d4=70 nm |a42=MMP |d42=52 nm | |a4=CPP |d4=70 nm |a42=MMP |d42=52 nm | ||
|a5=P<sub>''fin''</sub> |d5=42 nm | |a5=P<sub>''fin''</sub> |d5=42 nm | ||
− | |a6=W<sub>''fin''</sub> |d6=8 nm |a62=H<sub>''fin''</sub> |d62=42 | + | |a6=W<sub>''fin''</sub> |d6=8 nm |a62=H<sub>''fin''</sub> |d62=42 nm |
}} | }} | ||
− | {{intel proc tech |year= | + | {{intel proc tech |year=2017 |name=P1274 |mlayers=12 |node=10 nm |
− | |archs=Cannon Lake, | + | |archs=Cannon Lake, Icelake, Tigerlake |
|a1=T<sub>oxe</sub>|d1= |a12=Gate Dielectric |d12=High-κ | |a1=T<sub>oxe</sub>|d1= |a12=Gate Dielectric |d12=High-κ | ||
|a2=V<sub>dd</sub> |d2=0.70 V |a22=SRAM |d22=0.0312 µm² | |a2=V<sub>dd</sub> |d2=0.70 V |a22=SRAM |d22=0.0312 µm² | ||
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|a6=W<sub>''fin''</sub> |d6=7 nm |a62=H<sub>''fin''</sub> |d62=44-55 nm | |a6=W<sub>''fin''</sub> |d6=7 nm |a62=H<sub>''fin''</sub> |d62=44-55 nm | ||
}} | }} | ||
− | {{intel proc tech |year= | + | {{intel proc tech |year=2019 |name=P1276 |mlayers= |node=7 nm |
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}} | }} | ||
− | {{intel proc tech |year= | + | {{intel proc tech |year=2022 |name=P1278 |mlayers= |node=5 nm |
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}} | }} | ||
</table> | </table> | ||
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== Other processes == | == Other processes == | ||
{{other processes list}} | {{other processes list}} | ||
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