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Editing electronic-grade silicon
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! colspan="5" | Impurity Concentrations in MG-Si (ppm) | ! colspan="5" | Impurity Concentrations in MG-Si (ppm) | ||
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| Al || 1000-5000 || || B || 35-50 | | Al || 1000-5000 || || B || 35-50 | ||
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− | + | == Purification == | |
+ | The most common way to further purify metallurgical-grade silicon into electronic-grade silicon is by converting it into a liquid volatile silicon such as monosilane (SiH<sub>4</sub>), dichlorosilane (SiH<sub>2</sub>Cl<sub>2</sub>), and trichlorosilane (SiHCl<sub>3</sub>). | ||
=== Trichlorosilane === | === Trichlorosilane === |