Process Name
1st Production
Litho- graphy	Lithography
	Immersion
	Exposure
Wafer	Type
	Size
Tran- sistor	Type
	Voltage
Fin	Pitch
	Width
	Height
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM bitcell	High-Perf (HP)
	High-Density (HD)
	Low-Voltage (LV)
DRAM bitcell	eDRAM

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{{{process 1 name}}}		{{{process 2 name}}}		{{{process 3 name}}}
{{{process 1 date}}}		{{{process 2 date}}}		{{{process 3 date}}}
{{{process 1 wafer type}}}		{{{process 2 wafer type}}}		{{{process 3 wafer type}}}
{{{process 1 wafer size}}}		{{{process 2 wafer size}}}		{{{process 3 wafer size}}}
{{{process 1 wafer type}}}		{{{process 2 wafer type}}}		{{{process 3 wafer type}}}
{{{process 1 volt}}}		{{{process 2 volt}}}		{{{process 3 volt}}}
Value	{{{process 1 delta from}}}	Value	{{{process 2 delta from}}}	Value	{{{process 3 delta from}}}
{{{process 1 fin pitch}}}	{{{process 1 fin pitch Δ}}}	{{{process 2 fin pitch}}}	{{{process 2 fin pitch Δ}}}	{{{process 3 fin pitch}}}	{{{process 3 fin pitch Δ}}}
{{{process 1 fin width}}}	{{{process 1 fin width Δ}}}	{{{process 2 fin width}}}	{{{process 2 fin width Δ}}}	{{{process 3 fin width}}}	{{{process 3 fin width Δ}}}
{{{process 1 fin height}}}	{{{process 1 fin height Δ}}}	{{{process 2 fin height}}}	{{{process 2 fin height Δ}}}	{{{process 3 fin height}}}	{{{process 3 fin height Δ}}}
{{{process 1 gate len}}}	{{{process 1 gate len Δ}}}	{{{process 2 gate len}}}	{{{process 2 gate len Δ}}}	{{{process 3 gate len}}}	{{{process 3 gate len Δ}}}
{{{process 1 cpp}}}	{{{process 1 cpp Δ}}}	{{{process 2 cpp}}}	{{{process 2 cpp Δ}}}	{{{process 3 cpp}}}	{{{process 3 cpp Δ}}}
{{{process 1 mmp}}}	{{{process 1 mmp Δ}}}	{{{process 2 mmp}}}	{{{process 2 mmp Δ}}}	{{{process 3 mmp}}}	{{{process 3 mmp Δ}}}
{{{process 1 sram hp}}}	{{{process 1 sram hp Δ}}}	{{{process 2 sram hp}}}	{{{process 2 sram hp Δ}}}	{{{process 3 sram hp}}}	{{{process 3 sram hp Δ}}}
{{{process 1 sram hd}}}	{{{process 1 sram hd Δ}}}	{{{process 2 sram hd}}}	{{{process 2 sram hd Δ}}}	{{{process 3 sram hd}}}	{{{process 3 sram hd Δ}}}
{{{process 1 sram lv}}}	{{{process 1 sram lv Δ}}}	{{{process 2 sram lv}}}	{{{process 2 sram lv Δ}}}	{{{process 3 sram lv}}}	{{{process 3 sram lv Δ}}}
{{{process 1 dram}}}	{{{process 1 dram Δ}}}	{{{process 2 dram}}}	{{{process 2 dram Δ}}}	{{{process 3 dram}}}	{{{process 3 dram Δ}}}