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Difference between revisions of "Template:finfet nodes comp"

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|-
 
|-
 
| {{{process 1 fin pitch|}}} || {{{process 1 fin pitch Δ|}}}<!--
 
| {{{process 1 fin pitch|}}} || {{{process 1 fin pitch Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin pitch Δ|}}} || {{{process 2 fin pitch Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin pitch Δ|}}} {{!}}{{!}} {{{process 2 fin pitch Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin pitch Δ|}}} || {{{process 3 fin pitch Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin pitch Δ|}}} {{!}}{{!}} {{{process 3 fin pitch Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin pitch Δ|}}} || {{{process 4 fin pitch Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin pitch Δ|}}} {{!}}{{!}} {{{process 4 fin pitch Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin pitch Δ|}}} || {{{process 5 fin pitch Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin pitch Δ|}}} {{!}}{{!}} {{{process 5 fin pitch Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin pitch Δ|}}} || {{{process 6 fin pitch Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin pitch Δ|}}} {{!}}{{!}} {{{process 6 fin pitch Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 fin width|}}} || {{{process 1 fin width Δ|}}}<!--
 
| {{{process 1 fin width|}}} || {{{process 1 fin width Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin width Δ|}}} || {{{process 2 fin width Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin width Δ|}}} {{!}}{{!}} {{{process 2 fin width Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin width Δ|}}} || {{{process 3 fin width Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin width Δ|}}} {{!}}{{!}} {{{process 3 fin width Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin width Δ|}}} || {{{process 4 fin width Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin width Δ|}}} {{!}}{{!}} {{{process 4 fin width Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin width Δ|}}} || {{{process 5 fin width Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin width Δ|}}} {{!}}{{!}} {{{process 5 fin width Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin width Δ|}}} || {{{process 6 fin width Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin width Δ|}}} {{!}}{{!}} {{{process 6 fin width Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 fin height|}}} || {{{process 1 fin height Δ|}}}<!--
 
| {{{process 1 fin height|}}} || {{{process 1 fin height Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin height Δ|}}} || {{{process 2 fin height Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin height Δ|}}} {{!}}{{!}} {{{process 2 fin height Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin height Δ|}}} || {{{process 3 fin height Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin height Δ|}}} {{!}}{{!}} {{{process 3 fin height Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin height Δ|}}} || {{{process 4 fin height Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin height Δ|}}} {{!}}{{!}} {{{process 4 fin height Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin height Δ|}}} || {{{process 5 fin height Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin height Δ|}}} {{!}}{{!}} {{{process 5 fin height Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin height Δ|}}} || {{{process 6 fin height Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin height Δ|}}} {{!}}{{!}} {{{process 6 fin height Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 gate len|}}} || {{{process 1 gate len Δ|}}}<!--
 
| {{{process 1 gate len|}}} || {{{process 1 gate len Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 gate len Δ|}}} || {{{process 2 gate len Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 gate len Δ|}}} {{!}}{{!}} {{{process 2 gate len Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 gate len Δ|}}} || {{{process 3 gate len Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 gate len Δ|}}} {{!}}{{!}} {{{process 3 gate len Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 gate len Δ|}}} || {{{process 4 gate len Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 gate len Δ|}}} {{!}}{{!}} {{{process 4 gate len Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 gate len Δ|}}} || {{{process 5 gate len Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 gate len Δ|}}} {{!}}{{!}} {{{process 5 gate len Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 gate len Δ|}}} || {{{process 6 gate len Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 gate len Δ|}}} {{!}}{{!}} {{{process 6 gate len Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 cpp|}}} || {{{process 1 cpp Δ|}}}<!--
 
| {{{process 1 cpp|}}} || {{{process 1 cpp Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 cpp Δ|}}} || {{{process 2 cpp Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 cpp Δ|}}} {{!}}{{!}} {{{process 2 cpp Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 cpp Δ|}}} || {{{process 3 cpp Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 cpp Δ|}}} {{!}}{{!}} {{{process 3 cpp Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 cpp Δ|}}} || {{{process 4 cpp Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 cpp Δ|}}} {{!}}{{!}} {{{process 4 cpp Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 cpp Δ|}}} || {{{process 5 cpp Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 cpp Δ|}}} {{!}}{{!}} {{{process 5 cpp Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 cpp Δ|}}} || {{{process 6 cpp Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 cpp Δ|}}} {{!}}{{!}} {{{process 6 cpp Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 mmp|}}} || {{{process 1 mmp Δ|}}}<!--
 
| {{{process 1 mmp|}}} || {{{process 1 mmp Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 mmp Δ|}}} || {{{process 2 mmp Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 mmp Δ|}}} {{!}}{{!}} {{{process 2 mmp Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 mmp Δ|}}} || {{{process 3 mmp Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 mmp Δ|}}} {{!}}{{!}} {{{process 3 mmp Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 mmp Δ|}}} || {{{process 4 mmp Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 mmp Δ|}}} {{!}}{{!}} {{{process 4 mmp Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 mmp Δ|}}} || {{{process 5 mmp Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 mmp Δ|}}} {{!}}{{!}} {{{process 5 mmp Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 mmp Δ|}}} || {{{process 6 mmp Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 mmp Δ|}}} {{!}}{{!}} {{{process 6 mmp Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 sram hp|}}} || {{{process 1 sram hp Δ|}}}<!--
 
| {{{process 1 sram hp|}}} || {{{process 1 sram hp Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram hp Δ|}}} || {{{process 2 sram hp Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram hp Δ|}}} {{!}}{{!}} {{{process 2 sram hp Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram hp Δ|}}} || {{{process 3 sram hp Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram hp Δ|}}} {{!}}{{!}} {{{process 3 sram hp Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram hp Δ|}}} || {{{process 4 sram hp Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram hp Δ|}}} {{!}}{{!}} {{{process 4 sram hp Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram hp Δ|}}} || {{{process 5 sram hp Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram hp Δ|}}} {{!}}{{!}} {{{process 5 sram hp Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram hp Δ|}}} || {{{process 6 sram hp Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram hp Δ|}}} {{!}}{{!}} {{{process 6 sram hp Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 sram hd|}}} || {{{process 1 sram hd Δ|}}}<!--
 
| {{{process 1 sram hd|}}} || {{{process 1 sram hd Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram hd Δ|}}} || {{{process 2 sram hd Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram hd Δ|}}} {{!}}{{!}} {{{process 2 sram hd Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram hd Δ|}}} || {{{process 3 sram hd Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram hd Δ|}}} {{!}}{{!}} {{{process 3 sram hd Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram hd Δ|}}} || {{{process 4 sram hd Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram hd Δ|}}} {{!}}{{!}} {{{process 4 sram hd Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram hd Δ|}}} || {{{process 5 sram hd Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram hd Δ|}}} {{!}}{{!}} {{{process 5 sram hd Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram hd Δ|}}} || {{{process 6 sram hd Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram hd Δ|}}} {{!}}{{!}} {{{process 6 sram hd Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 sram lv|}}} || {{{process 1 sram lv Δ|}}}<!--
 
| {{{process 1 sram lv|}}} || {{{process 1 sram lv Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram lv Δ|}}} || {{{process 2 sram lv Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram lv Δ|}}} {{!}}{{!}} {{{process 2 sram lv Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram lv Δ|}}} || {{{process 3 sram lv Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram lv Δ|}}} {{!}}{{!}} {{{process 3 sram lv Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram lv Δ|}}} || {{{process 4 sram lv Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram lv Δ|}}} {{!}}{{!}} {{{process 4 sram lv Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram lv Δ|}}} || {{{process 5 sram lv Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram lv Δ|}}} {{!}}{{!}} {{{process 5 sram lv Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram lv Δ|}}} || {{{process 6 sram lv Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram lv Δ|}}} {{!}}{{!}} {{{process 6 sram lv Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 dram|}}} || {{{process 1 dram Δ|}}}<!--
 
| {{{process 1 dram|}}} || {{{process 1 dram Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 dram Δ|}}} || {{{process 2 dram Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 dram Δ|}}} {{!}}{{!}} {{{process 2 dram Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 dram Δ|}}} || {{{process 3 dram Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 dram Δ|}}} {{!}}{{!}} {{{process 3 dram Δ|}}} }}<!--
−
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 dram Δ|}}} || {{{process 4 dram Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 dram Δ|}}} {{!}}{{!}} {{{process 4 dram Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 dram Δ|}}} || {{{process 5 dram Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 dram Δ|}}} {{!}}{{!}} {{{process 5 dram Δ|}}} }}<!--
−
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 dram Δ|}}} || {{{process 6 dram Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 dram Δ|}}} {{!}}{{!}} {{{process 6 dram Δ|}}} }}
 
|}
 
|}
 
</div>
 
</div>

Revision as of 02:39, 5 April 2017

 
Process Name
1st Production
Lithography Lithography
Immersion
Exposure
Wafer Type
Size
Transistor Type
Voltage
 
Fin Pitch
Width
Height
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM bitcell High-Perf (HP)
High-Density (HD)
Low-Voltage (LV)
DRAM bitcell eDRAM
Value
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