| colspan="2" | {{{process 1 fab}}} || colspan="2" | {{{process 2 fab}}} || colspan="2" | {{{process 3 fab}}}

| colspan="2" | {{{process 1 name}}} || colspan="2" | {{{process 2 name}}} || colspan="2" | {{{process 3 name}}}

| colspan="2" | {{{process 1 date}}} || colspan="2" | {{{process 2 date}}} || colspan="2" | {{{process 3 date}}}

| colspan="2" | {{{process 1 wafer type}}} || colspan="2" | {{{process 2 wafer type}}} || colspan="2" | {{{process 3 wafer type}}}

| colspan="2" | {{{process 1 wafer size}}} || colspan="2" | {{{process 2 wafer size}}} || colspan="2" | {{{process 3 wafer size}}}

| colspan="2" | {{{process 1 wafer type}}} || colspan="2" | {{{process 2 wafer type}}} || colspan="2" | {{{process 3 wafer type}}}

| colspan="2" | {{{process 1 volt}}} || colspan="2" | {{{process 2 volt}}} || colspan="2" | {{{process 3 volt}}}

! Value !! {{{process 1 delta from}}} !! Value !! {{{process 2 delta from}}} !! Value !! {{{process 3 delta from}}}

| {{{process 1 fin pitch}}} || {{{process 1 fin pitch Δ}}} || {{{process 2 fin pitch}}} || {{{process 2 fin pitch Δ}}} || {{{process 3 fin pitch}}} || {{{process 3 fin pitch Δ}}}

| {{{process 1 fin width}}} || {{{process 1 fin width Δ}}} || {{{process 2 fin width}}} || {{{process 2 fin width Δ}}} || {{{process 3 fin width}}} || {{{process 3 fin width Δ}}}

| {{{process 1 fin height}}} || {{{process 1 fin height Δ}}} || {{{process 2 fin height}}} || {{{process 2 fin height Δ}}} || {{{process 3 fin height}}} || {{{process 3 fin height Δ}}}

| {{{process 1 gate len}}} || {{{process 1 gate len Δ}}} || {{{process 2 gate len}}} || {{{process 2 gate len Δ}}} || {{{process 3 gate len}}} || {{{process 3 gate len Δ}}}

| {{{process 1 cpp}}} || {{{process 1 cpp Δ}}} || {{{process 2 cpp}}} || {{{process 2 cpp Δ}}} || {{{process 3 cpp}}} || {{{process 3 cpp Δ}}}

| {{{process 1 mmp}}} || {{{process 1 mmp Δ}}} || {{{process 2 mmp}}} || {{{process 2 mmp Δ}}} || {{{process 3 mmp}}} || {{{process 3 mmp Δ}}}

| {{{process 1 sram hp}}} || {{{process 1 sram hp Δ}}} || {{{process 2 sram hp}}} || {{{process 2 sram hp Δ}}} || {{{process 3 sram hp}}} || {{{process 3 sram hp Δ}}}

| {{{process 1 sram hd}}} || {{{process 1 sram hd Δ}}} || {{{process 2 sram hd}}} || {{{process 2 sram hd Δ}}} || {{{process 3 sram hd}}} || {{{process 3 sram hd Δ}}}

| {{{process 1 sram lv}}} || {{{process 1 sram lv Δ}}} || {{{process 2 sram lv}}} || {{{process 2 sram lv Δ}}} || {{{process 3 sram lv}}} || {{{process 3 sram lv Δ}}}

| {{{process 1 dram}}} || {{{process 1 dram Δ}}} || {{{process 2 dram}}} || {{{process 2 dram Δ}}} || {{{process 3 dram}}} || {{{process 3 dram Δ}}}