From WikiChip
Difference between revisions of "Template:finfet nodes comp"

 
(48 intermediate revisions by the same user not shown)
Line 3: Line 3:
 
{| class="wikitable" style="margin:0; {{{style|}}}"
 
{| class="wikitable" style="margin:0; {{{style|}}}"
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 fab|}}} || colspan="2" | {{{process 2 fab|}}} || colspan="2" | {{{process 3 fab|}}}
+
! colspan="2" | {{{process 1 fab|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fab|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fab|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fab|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fab|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fab|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 name|}}} || colspan="2" | {{{process 2 name|}}} || colspan="2" | {{{process 3 name|}}}
+
| colspan="2" | {{{process 1 name|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 name|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 name|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 name|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 name|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 name|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 date|}}} || colspan="2" | {{{process 2 date|}}} || colspan="2" | {{{process 3 date|}}}
+
| colspan="2" | {{{process 1 date|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 date|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 date|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 date|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 date|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 date|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 wafer type|}}} || colspan="2" | {{{process 2 wafer type|}}} || colspan="2" | {{{process 3 wafer type|}}}
+
| colspan="2" | {{{process 1 lith|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 lith|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 lith|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 lith|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 lith|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 lith|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 wafer size|}}} || colspan="2" | {{{process 2 wafer size|}}} || colspan="2" | {{{process 3 wafer size|}}}
+
| colspan="2" | {{{process 1 immersion|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 immersion|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 immersion|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 immersion|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 immersion|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 immersion|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 wafer type|}}} || colspan="2" | {{{process 2 wafer type|}}} || colspan="2" | {{{process 3 wafer type|}}}
+
| colspan="2" | {{{process 1 exposure|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 exposure|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 exposure|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 exposure|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 exposure|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 exposure|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 volt|}}} || colspan="2" | {{{process 2 volt|}}} || colspan="2" | {{{process 3 volt|}}}
+
| colspan="2" | {{{process 1 wafer type|}}}<!--
−
|-
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 wafer type|}}} }}<!--
−
! Value !! {{{process 1 delta from|}}} !! Value !! {{{process 2 delta from|}}} !! Value !! {{{process 3 delta from|}}}
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 wafer type|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 wafer type|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 wafer type|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 wafer type|}}} }}
 +
|- style="text-align: center;"
 +
| colspan="2" | {{{process 1 wafer size|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 wafer size|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 wafer size|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 wafer size|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 wafer size|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 wafer size|}}} }}
 +
|- style="text-align: center;"
 +
| colspan="2" | {{{process 1 transistor|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 transistor|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 transistor|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 transistor|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 transistor|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 transistor|}}} }}
 +
|- style="text-align: center;"
 +
| colspan="2" | {{{process 1 volt|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 volt|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 volt|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 volt|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 volt|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 volt|}}} }}
 +
|-  
 +
! Value !! {{{process 1 delta from|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 2 delta from|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 3 delta from|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 4 delta from|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 5 delta from|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 6 delta from|}}} }}
 
|-
 
|-
−
| {{{process 1 fin pitch|}}} || {{{process 1 fin pitch Δ|}}} || {{{process 2 fin pitch|}}} || {{{process 2 fin pitch Δ|}}} || {{{process 3 fin pitch|}}} || {{{process 3 fin pitch Δ|}}}
+
| {{#ifeq: {{{process 1 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 1 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 1 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 1 fin pitch Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 2 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 2 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 2 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 2 fin pitch Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 3 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 3 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 3 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 3 fin pitch Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 4 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 4 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 4 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 4 fin pitch Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 5 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 5 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 5 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 5 fin pitch Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 6 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 6 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 6 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 6 fin pitch Δ|}}} }} }} }}
 
|-
 
|-
−
| {{{process 1 fin width|}}} || {{{process 1 fin width Δ|}}} || {{{process 2 fin width|}}} || {{{process 2 fin width Δ|}}} || {{{process 3 fin width|}}} || {{{process 3 fin width Δ|}}}
+
| {{#ifeq: {{{process 1 fin pitch|}}} | - | | {{{process 1 fin width|}}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 1 fin width Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{#ifeq: {{{process 2 fin pitch|}}} | - | | {{!}}{{!}} {{{process 2 fin width|}}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 2 fin width Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{#ifeq: {{{process 3 fin pitch|}}} | - | | {{!}}{{!}} {{{process 3 fin width|}}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 3 fin width Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{#ifeq: {{{process 4 fin pitch|}}} | - | | {{!}}{{!}} {{{process 4 fin width|}}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 4 fin width Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{#ifeq: {{{process 5 fin pitch|}}} | - | | {{!}}{{!}} {{{process 5 fin width|}}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 5 fin width Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{#ifeq: {{{process 6 fin pitch|}}} | - | | {{!}}{{!}} {{{process 6 fin width|}}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 6 fin width Δ|}}} }} }} }}
 
|-
 
|-
−
| {{{process 1 fin height|}}} || {{{process 1 fin height Δ|}}} || {{{process 2 fin height|}}} || {{{process 2 fin height Δ|}}} || {{{process 3 fin height|}}} || {{{process 3 fin height Δ|}}}
+
| {{#ifeq: {{{process 1 fin pitch|}}} | - | | {{{process 1 fin height|}}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 1 fin height Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{#ifeq: {{{process 2 fin pitch|}}} | - | | {{!}}{{!}} {{{process 2 fin height|}}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 2 fin height Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{#ifeq: {{{process 3 fin pitch|}}} | - | | {{!}}{{!}} {{{process 3 fin height|}}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 3 fin height Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{#ifeq: {{{process 4 fin pitch|}}} | - | | {{!}}{{!}} {{{process 4 fin height|}}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 4 fin height Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{#ifeq: {{{process 5 fin pitch|}}} | - | | {{!}}{{!}} {{{process 5 fin height|}}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 5 fin height Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{#ifeq: {{{process 6 fin pitch|}}} | - | | {{!}}{{!}} {{{process 6 fin height|}}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 6 fin height Δ|}}} }} }} }}
 
|-
 
|-
−
| {{{process 1 gate len|}}} || {{{process 1 gate len Δ|}}} || {{{process 2 gate len|}}} || {{{process 2 gate len Δ|}}} || {{{process 3 gate len|}}} || {{{process 3 gate len Δ|}}}
+
| {{{process 1 gate len|}}} || {{#ifeq: {{{process 1 gate len Δ|}}} | - | | {{{process 1 gate len Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 gate len|}}} {{#ifeq: {{{process 2 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 2 gate len Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 gate len|}}} {{#ifeq: {{{process 3 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 3 gate len Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 gate len|}}} {{#ifeq: {{{process 4 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 4 gate len Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 gate len|}}} {{#ifeq: {{{process 5 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 5 gate len Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 gate len|}}} {{#ifeq: {{{process 6 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 6 gate len Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 cpp|}}} || {{{process 1 cpp Δ|}}} || {{{process 2 cpp|}}} || {{{process 2 cpp Δ|}}} || {{{process 3 cpp|}}} || {{{process 3 cpp Δ|}}}
+
| {{{process 1 cpp|}}} || {{#ifeq: {{{process 1 cpp Δ|}}} | - | | {{{process 1 cpp Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 cpp|}}} {{#ifeq: {{{process 2 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 2 cpp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 cpp|}}} {{#ifeq: {{{process 3 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 3 cpp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 cpp|}}} {{#ifeq: {{{process 4 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 4 cpp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 cpp|}}} {{#ifeq: {{{process 5 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 5 cpp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 cpp|}}} {{#ifeq: {{{process 6 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 6 cpp Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 mmp|}}} || {{{process 1 mmp Δ|}}} || {{{process 2 mmp|}}} || {{{process 2 mmp Δ|}}} || {{{process 3 mmp|}}} || {{{process 3 mmp Δ|}}}
+
| {{{process 1 mmp|}}} || {{#ifeq: {{{process 1 mmp Δ|}}} | - | | {{{process 1 mmp Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 mmp|}}} {{#ifeq: {{{process 2 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 2 mmp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 mmp|}}} {{#ifeq: {{{process 3 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 3 mmp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 mmp|}}} {{#ifeq: {{{process 4 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 4 mmp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 mmp|}}} {{#ifeq: {{{process 5 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 5 mmp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 mmp|}}} {{#ifeq: {{{process 6 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 6 mmp Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 sram hp|}}} || {{{process 1 sram hp Δ|}}} || {{{process 2 sram hp|}}} || {{{process 2 sram hp Δ|}}} || {{{process 3 sram hp|}}} || {{{process 3 sram hp Δ|}}}
+
| {{{process 1 sram hp|}}} || {{#ifeq: {{{process 1 sram hp Δ|}}} | - | | {{{process 1 sram hp Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hp|}}} {{#ifeq: {{{process 2 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hp|}}} {{#ifeq: {{{process 3 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram hp|}}} {{#ifeq: {{{process 4 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram hp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram hp|}}} {{#ifeq: {{{process 5 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram hp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hp|}}} {{#ifeq: {{{process 6 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hp Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 sram hd|}}} || {{{process 1 sram hd Δ|}}} || {{{process 2 sram hd|}}} || {{{process 2 sram hd Δ|}}} || {{{process 3 sram hd|}}} || {{{process 3 sram hd Δ|}}}
+
| {{{process 1 sram hd|}}} || {{#ifeq: {{{process 1 sram hd Δ|}}} | - | | {{{process 1 sram hd Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hd|}}} {{#ifeq: {{{process 2 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hd Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hd|}}} {{#ifeq: {{{process 3 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hd Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram hd|}}} {{#ifeq: {{{process 4 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram hd Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram hd|}}} {{#ifeq: {{{process 5 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram hd Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hd|}}} {{#ifeq: {{{process 6 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hd Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 sram lv|}}} || {{{process 1 sram lv Δ|}}} || {{{process 2 sram lv|}}} || {{{process 2 sram lv Δ|}}} || {{{process 3 sram lv|}}} || {{{process 3 sram lv Δ|}}}
+
| {{{process 1 sram lv|}}} || {{#ifeq: {{{process 1 sram lv Δ|}}} | - | | {{{process 1 sram lv Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram lv|}}} {{#ifeq: {{{process 2 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram lv Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram lv|}}} {{#ifeq: {{{process 3 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram lv Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram lv|}}} {{#ifeq: {{{process 4 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram lv Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram lv|}}} {{#ifeq: {{{process 5 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram lv Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram lv|}}} {{#ifeq: {{{process 6 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram lv Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 dram|}}} || {{{process 1 dram Δ|}}} || {{{process 2 dram|}}} || {{{process 2 dram Δ|}}} || {{{process 3 dram|}}} || {{{process 3 dram Δ|}}}
+
| {{{process 1 dram|}}} || {{#ifeq: {{{process 1 dram Δ|}}} | - | | {{{process 1 dram Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 dram|}}} {{#ifeq: {{{process 2 dram Δ|}}} | - | | {{!}}{{!}} {{{process 2 dram Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 dram|}}} {{#ifeq: {{{process 3 dram Δ|}}} | - | | {{!}}{{!}} {{{process 3 dram Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 dram|}}} {{#ifeq: {{{process 4 dram Δ|}}} | - | | {{!}}{{!}} {{{process 4 dram Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 dram|}}} {{#ifeq: {{{process 5 dram Δ|}}} | - | | {{!}}{{!}} {{{process 5 dram Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 dram|}}} {{#ifeq: {{{process 6 dram Δ|}}} | - | | {{!}}{{!}} {{{process 6 dram Δ|}}} }} }}
 
|}
 
|}
 
</div>
 
</div>

Latest revision as of 08:21, 5 April 2017

 
Process Name
1st Production
Litho-
graphy 		Lithography
Immersion
Exposure
Wafer Type
Size
Tran-
sistor 		Type
Voltage
 
Fin Pitch
Width
Height
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM
bitcell 		High-Perf (HP)
High-Density (HD)
Low-Voltage (LV)
DRAM
bitcell 		eDRAM
Value
Retrieved from "https://en.wikichip.org/w/index.php?title=Template:finfet_nodes_comp&oldid=40903"