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Difference between revisions of "Template:finfet nodes comp"

 
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{| class="wikitable" style="margin:0; {{{style|}}}"
 
{| class="wikitable" style="margin:0; {{{style|}}}"
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 fab}}} || colspan="2" | {{{process 2 fab}}} || colspan="2" | {{{process 3 fab}}}
+
! colspan="2" | {{{process 1 fab|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fab|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fab|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fab|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fab|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fab|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 name}}} || colspan="2" | {{{process 2 name}}} || colspan="2" | {{{process 3 name}}}
+
| colspan="2" | {{{process 1 name|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 name|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 name|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 name|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 name|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 name|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 date}}} || colspan="2" | {{{process 2 date}}} || colspan="2" | {{{process 3 date}}}
+
| colspan="2" | {{{process 1 date|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 date|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 date|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 date|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 date|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 date|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 wafer type}}} || colspan="2" | {{{process 2 wafer type}}} || colspan="2" | {{{process 3 wafer type}}}
+
| colspan="2" | {{{process 1 lith|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 lith|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 lith|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 lith|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 lith|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 lith|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 wafer size}}} || colspan="2" | {{{process 2 wafer size}}} || colspan="2" | {{{process 3 wafer size}}}
+
| colspan="2" | {{{process 1 immersion|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 immersion|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 immersion|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 immersion|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 immersion|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 immersion|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 wafer type}}} || colspan="2" | {{{process 2 wafer type}}} || colspan="2" | {{{process 3 wafer type}}}
+
| colspan="2" | {{{process 1 exposure|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 exposure|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 exposure|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 exposure|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 exposure|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 exposure|}}} }}
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | {{{process 1 volt}}} || colspan="2" | {{{process 2 volt}}} || colspan="2" | {{{process 3 volt}}}
+
| colspan="2" | {{{process 1 wafer type|}}}<!--
−
|-
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 wafer type|}}} }}<!--
−
! Value !! {{{process 1 delta from}}} !! Value !! {{{process 2 delta from}}} !! Value !! {{{process 3 delta from}}}
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 wafer type|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 wafer type|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 wafer type|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 wafer type|}}} }}
 +
|- style="text-align: center;"
 +
| colspan="2" | {{{process 1 wafer size|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 wafer size|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 wafer size|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 wafer size|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 wafer size|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 wafer size|}}} }}
 +
|- style="text-align: center;"
 +
| colspan="2" | {{{process 1 transistor|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 transistor|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 transistor|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 transistor|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 transistor|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 transistor|}}} }}
 +
|- style="text-align: center;"
 +
| colspan="2" | {{{process 1 volt|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 volt|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 volt|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 volt|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 volt|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 volt|}}} }}
 +
|-  
 +
! Value !! {{{process 1 delta from|}}}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 2 delta from|}}} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 3 delta from|}}} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 4 delta from|}}} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 5 delta from|}}} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 6 delta from|}}} }}
 
|-
 
|-
−
| {{{process 1 fin pitch}}} || {{{process 1 fin pitch Δ}}} || {{{process 2 fin pitch}}} || {{{process 2 fin pitch Δ}}} || {{{process 3 fin pitch}}} || {{{process 3 fin pitch Δ}}}
+
| {{#ifeq: {{{process 1 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 1 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 1 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 1 fin pitch Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 2 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 2 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 2 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 2 fin pitch Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 3 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 3 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 3 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 3 fin pitch Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 4 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 4 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 4 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 4 fin pitch Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 5 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 5 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 5 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 5 fin pitch Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 6 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 6 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 6 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 6 fin pitch Δ|}}} }} }} }}
 
|-
 
|-
−
| {{{process 1 fin width}}} || {{{process 1 fin width Δ}}} || {{{process 2 fin width}}} || {{{process 2 fin width Δ}}} || {{{process 3 fin width}}} || {{{process 3 fin width Δ}}}
+
| {{#ifeq: {{{process 1 fin pitch|}}} | - | | {{{process 1 fin width|}}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 1 fin width Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{#ifeq: {{{process 2 fin pitch|}}} | - | | {{!}}{{!}} {{{process 2 fin width|}}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 2 fin width Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{#ifeq: {{{process 3 fin pitch|}}} | - | | {{!}}{{!}} {{{process 3 fin width|}}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 3 fin width Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{#ifeq: {{{process 4 fin pitch|}}} | - | | {{!}}{{!}} {{{process 4 fin width|}}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 4 fin width Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{#ifeq: {{{process 5 fin pitch|}}} | - | | {{!}}{{!}} {{{process 5 fin width|}}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 5 fin width Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{#ifeq: {{{process 6 fin pitch|}}} | - | | {{!}}{{!}} {{{process 6 fin width|}}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 6 fin width Δ|}}} }} }} }}
 
|-
 
|-
−
| {{{process 1 fin height}}} || {{{process 1 fin height Δ}}} || {{{process 2 fin height}}} || {{{process 2 fin height Δ}}} || {{{process 3 fin height}}} || {{{process 3 fin height Δ}}}
+
| {{#ifeq: {{{process 1 fin pitch|}}} | - | | {{{process 1 fin height|}}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 1 fin height Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{#ifeq: {{{process 2 fin pitch|}}} | - | | {{!}}{{!}} {{{process 2 fin height|}}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 2 fin height Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{#ifeq: {{{process 3 fin pitch|}}} | - | | {{!}}{{!}} {{{process 3 fin height|}}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 3 fin height Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{#ifeq: {{{process 4 fin pitch|}}} | - | | {{!}}{{!}} {{{process 4 fin height|}}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 4 fin height Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{#ifeq: {{{process 5 fin pitch|}}} | - | | {{!}}{{!}} {{{process 5 fin height|}}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 5 fin height Δ|}}} }} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{#ifeq: {{{process 6 fin pitch|}}} | - | | {{!}}{{!}} {{{process 6 fin height|}}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - |  | {{!}}{{!}} {{{process 6 fin height Δ|}}} }} }} }}
 
|-
 
|-
−
| {{{process 1 gate len}}} || {{{process 1 gate len Δ}}} || {{{process 2 gate len}}} || {{{process 2 gate len Δ}}} || {{{process 3 gate len}}} || {{{process 3 gate len Δ}}}
+
| {{{process 1 gate len|}}} || {{#ifeq: {{{process 1 gate len Δ|}}} | - | | {{{process 1 gate len Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 gate len|}}} {{#ifeq: {{{process 2 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 2 gate len Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 gate len|}}} {{#ifeq: {{{process 3 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 3 gate len Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 gate len|}}} {{#ifeq: {{{process 4 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 4 gate len Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 gate len|}}} {{#ifeq: {{{process 5 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 5 gate len Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 gate len|}}} {{#ifeq: {{{process 6 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 6 gate len Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 cpp}}} || {{{process 1 cpp Δ}}} || {{{process 2 cpp}}} || {{{process 2 cpp Δ}}} || {{{process 3 cpp}}} || {{{process 3 cpp Δ}}}
+
| {{{process 1 cpp|}}} || {{#ifeq: {{{process 1 cpp Δ|}}} | - | | {{{process 1 cpp Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 cpp|}}} {{#ifeq: {{{process 2 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 2 cpp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 cpp|}}} {{#ifeq: {{{process 3 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 3 cpp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 cpp|}}} {{#ifeq: {{{process 4 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 4 cpp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 cpp|}}} {{#ifeq: {{{process 5 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 5 cpp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 cpp|}}} {{#ifeq: {{{process 6 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 6 cpp Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 mmp}}} || {{{process 1 mmp Δ}}} || {{{process 2 mmp}}} || {{{process 2 mmp Δ}}} || {{{process 3 mmp}}} || {{{process 3 mmp Δ}}}
+
| {{{process 1 mmp|}}} || {{#ifeq: {{{process 1 mmp Δ|}}} | - | | {{{process 1 mmp Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 mmp|}}} {{#ifeq: {{{process 2 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 2 mmp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 mmp|}}} {{#ifeq: {{{process 3 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 3 mmp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 mmp|}}} {{#ifeq: {{{process 4 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 4 mmp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 mmp|}}} {{#ifeq: {{{process 5 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 5 mmp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 mmp|}}} {{#ifeq: {{{process 6 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 6 mmp Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 sram hp}}} || {{{process 1 sram hp Δ}}} || {{{process 2 sram hp}}} || {{{process 2 sram hp Δ}}} || {{{process 3 sram hp}}} || {{{process 3 sram hp Δ}}}
+
| {{{process 1 sram hp|}}} || {{#ifeq: {{{process 1 sram hp Δ|}}} | - | | {{{process 1 sram hp Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hp|}}} {{#ifeq: {{{process 2 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hp|}}} {{#ifeq: {{{process 3 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram hp|}}} {{#ifeq: {{{process 4 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram hp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram hp|}}} {{#ifeq: {{{process 5 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram hp Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hp|}}} {{#ifeq: {{{process 6 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hp Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 sram hd}}} || {{{process 1 sram hd Δ}}} || {{{process 2 sram hd}}} || {{{process 2 sram hd Δ}}} || {{{process 3 sram hd}}} || {{{process 3 sram hd Δ}}}
+
| {{{process 1 sram hd|}}} || {{#ifeq: {{{process 1 sram hd Δ|}}} | - | | {{{process 1 sram hd Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hd|}}} {{#ifeq: {{{process 2 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hd Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hd|}}} {{#ifeq: {{{process 3 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hd Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram hd|}}} {{#ifeq: {{{process 4 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram hd Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram hd|}}} {{#ifeq: {{{process 5 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram hd Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hd|}}} {{#ifeq: {{{process 6 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hd Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 sram lv}}} || {{{process 1 sram lv Δ}}} || {{{process 2 sram lv}}} || {{{process 2 sram lv Δ}}} || {{{process 3 sram lv}}} || {{{process 3 sram lv Δ}}}
+
| {{{process 1 sram lv|}}} || {{#ifeq: {{{process 1 sram lv Δ|}}} | - | | {{{process 1 sram lv Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram lv|}}} {{#ifeq: {{{process 2 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram lv Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram lv|}}} {{#ifeq: {{{process 3 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram lv Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram lv|}}} {{#ifeq: {{{process 4 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram lv Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram lv|}}} {{#ifeq: {{{process 5 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram lv Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram lv|}}} {{#ifeq: {{{process 6 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram lv Δ|}}} }} }}
 
|-
 
|-
−
| {{{process 1 dram}}} || {{{process 1 dram Δ}}} || {{{process 2 dram}}} || {{{process 2 dram Δ}}} || {{{process 3 dram}}} || {{{process 3 dram Δ}}}
+
| {{{process 1 dram|}}} || {{#ifeq: {{{process 1 dram Δ|}}} | - | | {{{process 1 dram Δ|}}} }}<!--
 +
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 dram|}}} {{#ifeq: {{{process 2 dram Δ|}}} | - | | {{!}}{{!}} {{{process 2 dram Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 dram|}}} {{#ifeq: {{{process 3 dram Δ|}}} | - | | {{!}}{{!}} {{{process 3 dram Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 dram|}}} {{#ifeq: {{{process 4 dram Δ|}}} | - | | {{!}}{{!}} {{{process 4 dram Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 dram|}}} {{#ifeq: {{{process 5 dram Δ|}}} | - | | {{!}}{{!}} {{{process 5 dram Δ|}}} }} }}<!--
 +
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 dram|}}} {{#ifeq: {{{process 6 dram Δ|}}} | - | | {{!}}{{!}} {{{process 6 dram Δ|}}} }} }}
 
|}
 
|}
 +
</div>

Latest revision as of 07:21, 5 April 2017

 
Process Name
1st Production
Lithography Lithography
Immersion
Exposure
Wafer Type
Size
Transistor Type
Voltage
 
Fin Pitch
Width
Height
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM bitcell High-Perf (HP)
High-Density (HD)
Low-Voltage (LV)
DRAM bitcell eDRAM
Value
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