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Difference between revisions of "Template:finfet nodes comp"

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|-
 
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| {{{process 1 fin pitch|}}} || {{{process 1 fin pitch Δ|}}}<!--
 
| {{{process 1 fin pitch|}}} || {{{process 1 fin pitch Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin pitch Δ|}}} {{!}}{{!}} {{{process 2 fin pitch Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 fin pitch Δ|}}} {{!}}{{!}} {{{process 2 fin pitch Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin pitch Δ|}}} {{!}}{{!}} {{{process 3 fin pitch Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 fin pitch Δ|}}} {{!}}{{!}} {{{process 3 fin pitch Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin pitch Δ|}}} {{!}}{{!}} {{{process 4 fin pitch Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 fin pitch Δ|}}} {{!}}{{!}} {{{process 4 fin pitch Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin pitch Δ|}}} {{!}}{{!}} {{{process 5 fin pitch Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 fin pitch Δ|}}} {{!}}{{!}} {{{process 5 fin pitch Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin pitch Δ|}}} {{!}}{{!}} {{{process 6 fin pitch Δ|}}} }}
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 fin pitch Δ|}}} {{!}}{{!}} {{{process 6 fin pitch Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 fin width|}}} || {{{process 1 fin width Δ|}}}<!--
 
| {{{process 1 fin width|}}} || {{{process 1 fin width Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin width Δ|}}} {{!}}{{!}} {{{process 2 fin width Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 fin width Δ|}}} {{!}}{{!}} {{{process 2 fin width Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin width Δ|}}} {{!}}{{!}} {{{process 3 fin width Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 fin width Δ|}}} {{!}}{{!}} {{{process 3 fin width Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin width Δ|}}} {{!}}{{!}} {{{process 4 fin width Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 fin width Δ|}}} {{!}}{{!}} {{{process 4 fin width Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin width Δ|}}} {{!}}{{!}} {{{process 5 fin width Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 fin width Δ|}}} {{!}}{{!}} {{{process 5 fin width Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin width Δ|}}} {{!}}{{!}} {{{process 6 fin width Δ|}}} }}
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 fin width Δ|}}} {{!}}{{!}} {{{process 6 fin width Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 fin height|}}} || {{{process 1 fin height Δ|}}}<!--
 
| {{{process 1 fin height|}}} || {{{process 1 fin height Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fin height Δ|}}} {{!}}{{!}} {{{process 2 fin height Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 fin height Δ|}}} {{!}}{{!}} {{{process 2 fin height Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fin height Δ|}}} {{!}}{{!}} {{{process 3 fin height Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 fin height Δ|}}} {{!}}{{!}} {{{process 3 fin height Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fin height Δ|}}} {{!}}{{!}} {{{process 4 fin height Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 fin height Δ|}}} {{!}}{{!}} {{{process 4 fin height Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fin height Δ|}}} {{!}}{{!}} {{{process 5 fin height Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 fin height Δ|}}} {{!}}{{!}} {{{process 5 fin height Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fin height Δ|}}} {{!}}{{!}} {{{process 6 fin height Δ|}}} }}
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 fin height Δ|}}} {{!}}{{!}} {{{process 6 fin height Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 gate len|}}} || {{{process 1 gate len Δ|}}}<!--
 
| {{{process 1 gate len|}}} || {{{process 1 gate len Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 gate len Δ|}}} {{!}}{{!}} {{{process 2 gate len Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 gate len Δ|}}} {{!}}{{!}} {{{process 2 gate len Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 gate len Δ|}}} {{!}}{{!}} {{{process 3 gate len Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 gate len Δ|}}} {{!}}{{!}} {{{process 3 gate len Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 gate len Δ|}}} {{!}}{{!}} {{{process 4 gate len Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 gate len Δ|}}} {{!}}{{!}} {{{process 4 gate len Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 gate len Δ|}}} {{!}}{{!}} {{{process 5 gate len Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 gate len Δ|}}} {{!}}{{!}} {{{process 5 gate len Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 gate len Δ|}}} {{!}}{{!}} {{{process 6 gate len Δ|}}} }}
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 gate len Δ|}}} {{!}}{{!}} {{{process 6 gate len Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 cpp|}}} || {{{process 1 cpp Δ|}}}<!--
 
| {{{process 1 cpp|}}} || {{{process 1 cpp Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 cpp Δ|}}} {{!}}{{!}} {{{process 2 cpp Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 cpp Δ|}}} {{!}}{{!}} {{{process 2 cpp Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 cpp Δ|}}} {{!}}{{!}} {{{process 3 cpp Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 cpp Δ|}}} {{!}}{{!}} {{{process 3 cpp Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 cpp Δ|}}} {{!}}{{!}} {{{process 4 cpp Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 cpp Δ|}}} {{!}}{{!}} {{{process 4 cpp Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 cpp Δ|}}} {{!}}{{!}} {{{process 5 cpp Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 cpp Δ|}}} {{!}}{{!}} {{{process 5 cpp Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 cpp Δ|}}} {{!}}{{!}} {{{process 6 cpp Δ|}}} }}
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 cpp Δ|}}} {{!}}{{!}} {{{process 6 cpp Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 mmp|}}} || {{{process 1 mmp Δ|}}}<!--
 
| {{{process 1 mmp|}}} || {{{process 1 mmp Δ|}}}<!--
−
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 mmp Δ|}}} {{!}}{{!}} {{{process 2 mmp Δ|}}} }}<!--
+
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 mmp Δ|}}} {{!}}{{!}} {{{process 2 mmp Δ|}}} }}<!--
−
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 mmp Δ|}}} {{!}}{{!}} {{{process 3 mmp Δ|}}} }}<!--
+
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 mmp Δ|}}} {{!}}{{!}} {{{process 3 mmp Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 mmp Δ|}}} {{!}}{{!}} {{{process 4 mmp Δ|}}} }}<!--
+
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 mmp Δ|}}} {{!}}{{!}} {{{process 4 mmp Δ|}}} }}<!--
−
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 mmp Δ|}}} {{!}}{{!}} {{{process 5 mmp Δ|}}} }}<!--
+
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 mmp Δ|}}} {{!}}{{!}} {{{process 5 mmp Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 mmp Δ|}}} {{!}}{{!}} {{{process 6 mmp Δ|}}} }}
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 mmp Δ|}}} {{!}}{{!}} {{{process 6 mmp Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 sram hp|}}} || {{{process 1 sram hp Δ|}}}<!--
 
| {{{process 1 sram hp|}}} || {{{process 1 sram hp Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram hp Δ|}}} {{!}}{{!}} {{{process 2 sram hp Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 sram hp Δ|}}} {{!}}{{!}} {{{process 2 sram hp Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram hp Δ|}}} {{!}}{{!}} {{{process 3 sram hp Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 sram hp Δ|}}} {{!}}{{!}} {{{process 3 sram hp Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram hp Δ|}}} {{!}}{{!}} {{{process 4 sram hp Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 sram hp Δ|}}} {{!}}{{!}} {{{process 4 sram hp Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram hp Δ|}}} {{!}}{{!}} {{{process 5 sram hp Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 sram hp Δ|}}} {{!}}{{!}} {{{process 5 sram hp Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram hp Δ|}}} {{!}}{{!}} {{{process 6 sram hp Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 sram hp Δ|}}} {{!}}{{!}} {{{process 6 sram hp Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 sram hd|}}} || {{{process 1 sram hd Δ|}}}<!--
 
| {{{process 1 sram hd|}}} || {{{process 1 sram hd Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram hd Δ|}}} {{!}}{{!}} {{{process 2 sram hd Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 sram hd Δ|}}} {{!}}{{!}} {{{process 2 sram hd Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram hd Δ|}}} {{!}}{{!}} {{{process 3 sram hd Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 sram hd Δ|}}} {{!}}{{!}} {{{process 3 sram hd Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram hd Δ|}}} {{!}}{{!}} {{{process 4 sram hd Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 sram hd Δ|}}} {{!}}{{!}} {{{process 4 sram hd Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram hd Δ|}}} {{!}}{{!}} {{{process 5 sram hd Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 sram hd Δ|}}} {{!}}{{!}} {{{process 5 sram hd Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram hd Δ|}}} {{!}}{{!}} {{{process 6 sram hd Δ|}}} }}
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 sram hd Δ|}}} {{!}}{{!}} {{{process 6 sram hd Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 sram lv|}}} || {{{process 1 sram lv Δ|}}}<!--
 
| {{{process 1 sram lv|}}} || {{{process 1 sram lv Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 sram lv Δ|}}} {{!}}{{!}} {{{process 2 sram lv Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 sram lv Δ|}}} {{!}}{{!}} {{{process 2 sram lv Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 sram lv Δ|}}} {{!}}{{!}} {{{process 3 sram lv Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 sram lv Δ|}}} {{!}}{{!}} {{{process 3 sram lv Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 sram lv Δ|}}} {{!}}{{!}} {{{process 4 sram lv Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 sram lv Δ|}}} {{!}}{{!}} {{{process 4 sram lv Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 sram lv Δ|}}} {{!}}{{!}} {{{process 5 sram lv Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 sram lv Δ|}}} {{!}}{{!}} {{{process 5 sram lv Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 sram lv Δ|}}} {{!}}{{!}} {{{process 6 sram lv Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 sram lv Δ|}}} {{!}}{{!}} {{{process 6 sram lv Δ|}}} }}
 
|-
 
|-
 
| {{{process 1 dram|}}} || {{{process 1 dram Δ|}}}<!--
 
| {{{process 1 dram|}}} || {{{process 1 dram Δ|}}}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 dram Δ|}}} {{!}}{{!}} {{{process 2 dram Δ|}}} }}<!--
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-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{!}} {{{process 2 dram Δ|}}} {{!}}{{!}} {{{process 2 dram Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 dram Δ|}}} {{!}}{{!}} {{{process 3 dram Δ|}}} }}<!--
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-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{!}} {{{process 3 dram Δ|}}} {{!}}{{!}} {{{process 3 dram Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 dram Δ|}}} {{!}}{{!}} {{{process 4 dram Δ|}}} }}<!--
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{!}} {{{process 4 dram Δ|}}} {{!}}{{!}} {{{process 4 dram Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 dram Δ|}}} {{!}}{{!}} {{{process 5 dram Δ|}}} }}<!--
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-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{!}} {{{process 5 dram Δ|}}} {{!}}{{!}} {{{process 5 dram Δ|}}} }}<!--
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 dram Δ|}}} {{!}}{{!}} {{{process 6 dram Δ|}}} }}
+
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{!}} {{{process 6 dram Δ|}}} {{!}}{{!}} {{{process 6 dram Δ|}}} }}
 
|}
 
|}
 
</div>
 
</div>

Revision as of 02:39, 5 April 2017

 
Process Name
1st Production
Lithography Lithography
Immersion
Exposure
Wafer Type
Size
Transistor Type
Voltage
 
Fin Pitch
Width
Height
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM bitcell High-Perf (HP)
High-Density (HD)
Low-Voltage (LV)
DRAM bitcell eDRAM
Value
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