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Difference between revisions of "Template:finfet nodes comp"
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|- style="text-align: center;" | |- style="text-align: center;" | ||
| colspan="2" | {{{process 1 date|}}} || colspan="2" | {{{process 2 date|}}} || colspan="2" | {{{process 3 date|}}} | | colspan="2" | {{{process 1 date|}}} || colspan="2" | {{{process 2 date|}}} || colspan="2" | {{{process 3 date|}}} | ||
+ | |- style="text-align: center;" | ||
+ | | colspan="2" | {{{process 1 lith|}}} || colspan="2" | {{{process 2 lith|}}} || colspan="2" | {{{process 3 lith|}}} | ||
+ | |- style="text-align: center;" | ||
+ | | colspan="2" | {{{process 1 immersion|}}} || colspan="2" | {{{process 2 immersion|}}} || colspan="2" | {{{process 3 immersion|}}} | ||
+ | |- style="text-align: center;" | ||
+ | | colspan="2" | {{{process 1 exposure|}}} || colspan="2" | {{{process 2 exposure|}}} || colspan="2" | {{{process 3 exposure|}}} | ||
|- style="text-align: center;" | |- style="text-align: center;" | ||
| colspan="2" | {{{process 1 wafer type|}}} || colspan="2" | {{{process 2 wafer type|}}} || colspan="2" | {{{process 3 wafer type|}}} | | colspan="2" | {{{process 1 wafer type|}}} || colspan="2" | {{{process 2 wafer type|}}} || colspan="2" | {{{process 3 wafer type|}}} |
Revision as of 23:23, 4 April 2017
Process Name | |
---|---|
1st Production | |
Lithography | Lithography |
Immersion | |
Exposure | |
Wafer | Type |
Size | |
Transistor | Type |
Voltage | |
Fin | Pitch |
Width | |
Height | |
Gate Length (Lg) | |
Contacted Gate Pitch (CPP) | |
Minimum Metal Pitch (MMP) | |
SRAM bitcell | High-Perf (HP) |
High-Density (HD) | |
Low-Voltage (LV) | |
DRAM bitcell | eDRAM |
Value | Value | Value | |||
---|---|---|---|---|---|