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Editing single diffusion break
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==Overview== | ==Overview== | ||
− | Double [[diffusion break]] (DDB) isolation has historically been used to isolate neighboring devices in order to provide good process control (stress) and reduce [[process variability|variations]]. Single diffusion break reduces the cell-to-cell spacing by reducing the width of the [[shallow trench isolation]] to a single dummy [[poly gate]] [[gate length|length]]. In practice, there is no actual dummy gate. Instead, just the trench isolation remains. | + | Double [[diffusion break]] (DDB) isolation has historically been used to isolate neighboring devices in order to provide good process control (stress) and reduce [[process variability|variations]]. With advancements in [[DTCO]], advanced [[process nodes]] reduced [[cell height]], thereby increasing the share of wasted space due to cell-to-cell spacings as a result of DDB. Single diffusion break reduces the cell-to-cell spacing by reducing the width of the [[shallow trench isolation]] to a single dummy [[poly gate]] [[gate length|length]]. In practice, there is no actual dummy gate. Instead, just the trench isolation remains. |
:[[File:ttt-cell-scaling-sdb.svg|800px]] | :[[File:ttt-cell-scaling-sdb.svg|800px]] | ||
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==Industry== | ==Industry== |