Semiconductor & Computer Engineering
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fab|}}} }}<!-- | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fab|}}} }}<!-- | ||
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fab|}}} }}<!-- | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fab|}}} }}<!-- | ||
| − | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 | + | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fab|}}} }} |
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|- style="text-align: center;" | |- style="text-align: center;" | ||
| colspan="2" | {{{process 1 name|}}}<!-- | | colspan="2" | {{{process 1 name|}}}<!-- | ||
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 name|}}} }}<!-- | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 name|}}} }}<!-- | ||
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 name|}}} }}<!-- | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 name|}}} }}<!-- | ||
| − | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 | + | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 name|}}} }} |
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|- style="text-align: center;" | |- style="text-align: center;" | ||
| colspan="2" | {{{process 1 date|}}}<!-- | | colspan="2" | {{{process 1 date|}}}<!-- | ||
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 date|}}} }}<!-- | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 date|}}} }}<!-- | ||
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 date|}}} }}<!-- | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 date|}}} }}<!-- | ||
| − | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 | + | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 date|}}} }} |
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|- style="text-align: center;" | |- style="text-align: center;" | ||
| colspan="2" | {{{process 1 lith|}}}<!-- | | colspan="2" | {{{process 1 lith|}}}<!-- | ||
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-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 lith|}}} }}<!-- | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 lith|}}} }}<!-- | ||
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 lith|}}} }}<!-- | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 lith|}}} }}<!-- | ||
| − | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 | + | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 lith|}}} }} |
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|- style="text-align: center;" | |- style="text-align: center;" | ||
| colspan="2" | {{{process 1 immersion|}}}<!-- | | colspan="2" | {{{process 1 immersion|}}}<!-- | ||
| Line 60: | Line 36: | ||
-->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 immersion|}}} }}<!-- | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 immersion|}}} }}<!-- | ||
-->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 immersion|}}} }}<!-- | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 immersion|}}} }}<!-- | ||
| − | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 | + | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 immersion|}}} }} |
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|- style="text-align: center;" | |- style="text-align: center;" | ||
| colspan="2" | {{{process 1 exposure|}}}<!-- | | colspan="2" | {{{process 1 exposure|}}}<!-- | ||
| Line 117: | Line 87: | ||
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 6 delta from|}}} }} | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 6 delta from|}}} }} | ||
|- | |- | ||
| − | | {{{process 1 gate len|}}} || {{#ifeq: {{{process 1 gate len Δ|}}} | - | | + | | {{{process 1 gate len|}}} || {{#ifeq: {{{process 1 gate len Δ|}}} | - | | {{{process 1 gate len Δ|}}} }}<!-- |
| − | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 gate len|} | + | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 gate len|}}} {{#ifeq: {{{process 2 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 2 gate len Δ|}}} }} }}<!-- |
| − | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 gate len|} | + | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 gate len|}}} {{#ifeq: {{{process 3 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 3 gate len Δ|}}} }} }}<!-- |
| − | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 gate len|} | + | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 gate len|}}} {{#ifeq: {{{process 4 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 4 gate len Δ|}}} }} }}<!-- |
| − | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 gate len|} | + | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 gate len|}}} {{#ifeq: {{{process 5 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 5 gate len Δ|}}} }} }}<!-- |
| − | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 gate len|} | + | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 gate len|}}} {{#ifeq: {{{process 6 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 6 gate len Δ|}}} }} }} |
|- | |- | ||
| − | | {{{process 1 cpp|}}} {{#ifeq: {{{process 1 cpp Δ|}}} | - | | | + | | {{{process 1 cpp|}}} || {{#ifeq: {{{process 1 cpp Δ|}}} | - | | {{{process 1 cpp Δ|}}} }}<!-- |
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 cpp|}}} {{#ifeq: {{{process 2 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 2 cpp Δ|}}} }} }}<!-- | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 cpp|}}} {{#ifeq: {{{process 2 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 2 cpp Δ|}}} }} }}<!-- | ||
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 cpp|}}} {{#ifeq: {{{process 3 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 3 cpp Δ|}}} }} }}<!-- | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 cpp|}}} {{#ifeq: {{{process 3 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 3 cpp Δ|}}} }} }}<!-- | ||
| Line 131: | Line 101: | ||
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 cpp|}}} {{#ifeq: {{{process 6 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 6 cpp Δ|}}} }} }} | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 cpp|}}} {{#ifeq: {{{process 6 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 6 cpp Δ|}}} }} }} | ||
|- | |- | ||
| − | | {{{process 1 mmp|}}} {{#ifeq: {{{process 1 mmp Δ|}}} | - | | | + | | {{{process 1 mmp|}}} || {{#ifeq: {{{process 1 mmp Δ|}}} | - | | {{{process 1 mmp Δ|}}} }}<!-- |
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 mmp|}}} {{#ifeq: {{{process 2 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 2 mmp Δ|}}} }} }}<!-- | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 mmp|}}} {{#ifeq: {{{process 2 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 2 mmp Δ|}}} }} }}<!-- | ||
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 mmp|}}} {{#ifeq: {{{process 3 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 3 mmp Δ|}}} }} }}<!-- | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 mmp|}}} {{#ifeq: {{{process 3 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 3 mmp Δ|}}} }} }}<!-- | ||
| Line 138: | Line 108: | ||
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 mmp|}}} {{#ifeq: {{{process 6 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 6 mmp Δ|}}} }} }} | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 mmp|}}} {{#ifeq: {{{process 6 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 6 mmp Δ|}}} }} }} | ||
|- | |- | ||
| − | | {{{process 1 sram hp|}}} {{#ifeq: {{{process 1 sram hp Δ|}}} | - | | | + | | {{{process 1 sram hp|}}} || {{#ifeq: {{{process 1 sram hp Δ|}}} | - | | {{{process 1 sram hp Δ|}}} }}<!-- |
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hp|}}} {{#ifeq: {{{process 2 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hp Δ|}}} }} }}<!-- | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hp|}}} {{#ifeq: {{{process 2 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hp Δ|}}} }} }}<!-- | ||
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hp|}}} {{#ifeq: {{{process 3 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hp Δ|}}} }} }}<!-- | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hp|}}} {{#ifeq: {{{process 3 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hp Δ|}}} }} }}<!-- | ||
| Line 145: | Line 115: | ||
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hp|}}} {{#ifeq: {{{process 6 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hp Δ|}}} }} }} | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hp|}}} {{#ifeq: {{{process 6 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hp Δ|}}} }} }} | ||
|- | |- | ||
| − | | {{{process 1 sram hd|}}} {{#ifeq: {{{process 1 sram hd Δ|}}} | - | | | + | | {{{process 1 sram hd|}}} || {{#ifeq: {{{process 1 sram hd Δ|}}} | - | | {{{process 1 sram hd Δ|}}} }}<!-- |
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hd|}}} {{#ifeq: {{{process 2 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hd Δ|}}} }} }}<!-- | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hd|}}} {{#ifeq: {{{process 2 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hd Δ|}}} }} }}<!-- | ||
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hd|}}} {{#ifeq: {{{process 3 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hd Δ|}}} }} }}<!-- | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hd|}}} {{#ifeq: {{{process 3 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hd Δ|}}} }} }}<!-- | ||
| Line 152: | Line 122: | ||
-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hd|}}} {{#ifeq: {{{process 6 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hd Δ|}}} }} }} | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hd|}}} {{#ifeq: {{{process 6 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hd Δ|}}} }} }} | ||
|- | |- | ||
| − | | {{{process 1 sram lv|}}} {{#ifeq: {{{process 1 sram lv Δ|}}} | - | | | + | | {{{process 1 sram lv|}}} || {{#ifeq: {{{process 1 sram lv Δ|}}} | - | | {{{process 1 sram lv Δ|}}} }}<!-- |
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram lv|}}} {{#ifeq: {{{process 2 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram lv Δ|}}} }} }}<!-- | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram lv|}}} {{#ifeq: {{{process 2 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram lv Δ|}}} }} }}<!-- | ||
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram lv|}}} {{#ifeq: {{{process 3 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram lv Δ|}}} }} }}<!-- | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram lv|}}} {{#ifeq: {{{process 3 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram lv Δ|}}} }} }}<!-- | ||
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-->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram lv|}}} {{#ifeq: {{{process 6 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram lv Δ|}}} }} }} | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram lv|}}} {{#ifeq: {{{process 6 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram lv Δ|}}} }} }} | ||
|- | |- | ||
| − | | {{{process 1 dram|}}} {{#ifeq: {{{process 1 dram Δ|}}} | - | | | + | | {{{process 1 dram|}}} || {{#ifeq: {{{process 1 dram Δ|}}} | - | | {{{process 1 dram Δ|}}} }}<!-- |
-->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 dram|}}} {{#ifeq: {{{process 2 dram Δ|}}} | - | | {{!}}{{!}} {{{process 2 dram Δ|}}} }} }}<!-- | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 dram|}}} {{#ifeq: {{{process 2 dram Δ|}}} | - | | {{!}}{{!}} {{{process 2 dram Δ|}}} }} }}<!-- | ||
-->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 dram|}}} {{#ifeq: {{{process 3 dram Δ|}}} | - | | {{!}}{{!}} {{{process 3 dram Δ|}}} }} }}<!-- | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 dram|}}} {{#ifeq: {{{process 3 dram Δ|}}} | - | | {{!}}{{!}} {{{process 3 dram Δ|}}} }} }}<!-- | ||