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| {| class="wikitable" style="margin:0; {{{style|}}}" | | {| class="wikitable" style="margin:0; {{{style|}}}" |
| |- style="text-align: center;" | | |- style="text-align: center;" |
− | ! colspan="2" | {{{process 1 fab|}}}<!-- | + | ! colspan="2" | {{{process 1 fab|}}} || colspan="2" | {{{process 2 fab|}}} || colspan="2" | {{{process 3 fab|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 fab|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 fab|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 fab|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 fab|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 fab|}}} }}
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| |- style="text-align: center;" | | |- style="text-align: center;" |
− | | colspan="2" | {{{process 1 name|}}}<!-- | + | | colspan="2" | {{{process 1 name|}}} || colspan="2" | {{{process 2 name|}}} || colspan="2" | {{{process 3 name|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 name|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 name|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 name|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 name|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 name|}}} }}
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| |- style="text-align: center;" | | |- style="text-align: center;" |
− | | colspan="2" | {{{process 1 date|}}}<!-- | + | | colspan="2" | {{{process 1 date|}}} || colspan="2" | {{{process 2 date|}}} || colspan="2" | {{{process 3 date|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 date|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 date|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 date|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 date|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 date|}}} }}
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| |- style="text-align: center;" | | |- style="text-align: center;" |
− | | colspan="2" | {{{process 1 lith|}}}<!-- | + | | colspan="2" | {{{process 1 wafer type|}}} || colspan="2" | {{{process 2 wafer type|}}} || colspan="2" | {{{process 3 wafer type|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 lith|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 lith|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 lith|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 lith|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 lith|}}} }}
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| |- style="text-align: center;" | | |- style="text-align: center;" |
− | | colspan="2" | {{{process 1 immersion|}}}<!-- | + | | colspan="2" | {{{process 1 wafer size|}}} || colspan="2" | {{{process 2 wafer size|}}} || colspan="2" | {{{process 3 wafer size|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 immersion|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 immersion|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 immersion|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 immersion|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 immersion|}}} }}
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| |- style="text-align: center;" | | |- style="text-align: center;" |
− | | colspan="2" | {{{process 1 exposure|}}}<!-- | + | | colspan="2" | {{{process 1 transistor|}}} || colspan="2" | {{{process 2 transistor|}}} || colspan="2" | {{{process 3 transistor|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 exposure|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 exposure|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 exposure|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 exposure|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 exposure|}}} }}
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| |- style="text-align: center;" | | |- style="text-align: center;" |
− | | colspan="2" | {{{process 1 wafer type|}}}<!-- | + | | colspan="2" | {{{process 1 volt|}}} || colspan="2" | {{{process 2 volt|}}} || colspan="2" | {{{process 3 volt|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 wafer type|}}} }}<!--
| + | |- |
− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 wafer type|}}} }}<!--
| + | ! Value !! {{{process 1 delta from|}}} !! Value !! {{{process 2 delta from|}}} !! Value !! {{{process 3 delta from|}}} |
− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 wafer type|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 wafer type|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 wafer type|}}} }}
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− | |- style="text-align: center;"
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− | | colspan="2" | {{{process 1 wafer size|}}}<!--
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− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 wafer size|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 wafer size|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 wafer size|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 wafer size|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 wafer size|}}} }}
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− | |- style="text-align: center;"
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− | | colspan="2" | {{{process 1 transistor|}}}<!--
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− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 transistor|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 transistor|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 transistor|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 transistor|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 transistor|}}} }}
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− | |- style="text-align: center;"
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− | | colspan="2" | {{{process 1 volt|}}}<!--
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− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 2 volt|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 3 volt|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 4 volt|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 5 volt|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} colspan="2" {{!}} {{{process 6 volt|}}} }}
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− | |- | |
− | ! Value !! {{{process 1 delta from|}}}<!-- | |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 2 delta from|}}} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 3 delta from|}}} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 4 delta from|}}} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 5 delta from|}}} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} Value {{!}}{{!}} {{{process 6 delta from|}}} }}
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| |- | | |- |
− | | {{#ifeq: {{{process 1 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 1 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 1 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 1 fin pitch Δ|}}} }} }}<!-- | + | | {{{process 1 fin pitch|}}} || {{{process 1 fin pitch Δ|}}} || {{{process 2 fin pitch|}}} || {{{process 2 fin pitch Δ|}}} || {{{process 3 fin pitch|}}} || {{{process 3 fin pitch Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 2 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 2 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 2 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 2 fin pitch Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 3 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 3 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 3 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 3 fin pitch Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 4 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 4 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 4 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 4 fin pitch Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 5 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 5 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 5 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 5 fin pitch Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{#ifeq: {{{process 6 fin pitch|}}} | - | rowspan="3" colspan="2" style="background: #a3a3a3;" {{!}} N/A | {{{process 6 fin pitch|}}} {{!}}{{!}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - | rowspan="{{#ifeq: {{{process 6 gate len Δ|}}} | - | 10 | 3 }}" style="background: #a3a3a3;" {{!}} N/A | {{{process 6 fin pitch Δ|}}} }} }} }}
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| |- | | |- |
− | | {{#ifeq: {{{process 1 fin pitch|}}} | - | | {{{process 1 fin width|}}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 1 fin width Δ|}}} }} }}<!--
| + | | {{{process 1 fin width|}}} || {{{process 1 fin width Δ|}}} || {{{process 2 fin width|}}} || {{{process 2 fin width Δ|}}} || {{{process 3 fin width|}}} || {{{process 3 fin width Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{#ifeq: {{{process 2 fin pitch|}}} | - | | {{!}}{{!}} {{{process 2 fin width|}}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 2 fin width Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{#ifeq: {{{process 3 fin pitch|}}} | - | | {{!}}{{!}} {{{process 3 fin width|}}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 3 fin width Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{#ifeq: {{{process 4 fin pitch|}}} | - | | {{!}}{{!}} {{{process 4 fin width|}}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 4 fin width Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{#ifeq: {{{process 5 fin pitch|}}} | - | | {{!}}{{!}} {{{process 5 fin width|}}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 5 fin width Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{#ifeq: {{{process 6 fin pitch|}}} | - | | {{!}}{{!}} {{{process 6 fin width|}}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 6 fin width Δ|}}} }} }} }}
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| |- | | |- |
− | | {{#ifeq: {{{process 1 fin pitch|}}} | - | | {{{process 1 fin height|}}} {{#ifeq: {{{process 1 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 1 fin height Δ|}}} }} }}<!--
| + | | {{{process 1 fin height|}}} || {{{process 1 fin height Δ|}}} || {{{process 2 fin height|}}} || {{{process 2 fin height Δ|}}} || {{{process 3 fin height|}}} || {{{process 3 fin height Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{#ifeq: {{{process 2 fin pitch|}}} | - | | {{!}}{{!}} {{{process 2 fin height|}}} {{#ifeq: {{{process 2 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 2 fin height Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{#ifeq: {{{process 3 fin pitch|}}} | - | | {{!}}{{!}} {{{process 3 fin height|}}} {{#ifeq: {{{process 3 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 3 fin height Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{#ifeq: {{{process 4 fin pitch|}}} | - | | {{!}}{{!}} {{{process 4 fin height|}}} {{#ifeq: {{{process 4 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 4 fin height Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{#ifeq: {{{process 5 fin pitch|}}} | - | | {{!}}{{!}} {{{process 5 fin height|}}} {{#ifeq: {{{process 5 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 5 fin height Δ|}}} }} }} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{#ifeq: {{{process 6 fin pitch|}}} | - | | {{!}}{{!}} {{{process 6 fin height|}}} {{#ifeq: {{{process 6 fin pitch Δ|}}} | - | | {{!}}{{!}} {{{process 6 fin height Δ|}}} }} }} }}
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− | | {{{process 1 gate len|}}} || {{#ifeq: {{{process 1 gate len Δ|}}} | - | | {{{process 1 gate len Δ|}}} }}<!-- | + | | {{{process 1 gate len|}}} || {{{process 1 gate len Δ|}}} || {{{process 2 gate len|}}} || {{{process 2 gate len Δ|}}} || {{{process 3 gate len|}}} || {{{process 3 gate len Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 gate len|}}} {{#ifeq: {{{process 2 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 2 gate len Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 gate len|}}} {{#ifeq: {{{process 3 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 3 gate len Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 gate len|}}} {{#ifeq: {{{process 4 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 4 gate len Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 gate len|}}} {{#ifeq: {{{process 5 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 5 gate len Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 gate len|}}} {{#ifeq: {{{process 6 gate len Δ|}}} | - | | {{!}}{{!}} {{{process 6 gate len Δ|}}} }} }}
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− | | {{{process 1 cpp|}}} || {{#ifeq: {{{process 1 cpp Δ|}}} | - | | {{{process 1 cpp Δ|}}} }}<!-- | + | | {{{process 1 cpp|}}} || {{{process 1 cpp Δ|}}} || {{{process 2 cpp|}}} || {{{process 2 cpp Δ|}}} || {{{process 3 cpp|}}} || {{{process 3 cpp Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 cpp|}}} {{#ifeq: {{{process 2 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 2 cpp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 cpp|}}} {{#ifeq: {{{process 3 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 3 cpp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 cpp|}}} {{#ifeq: {{{process 4 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 4 cpp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 cpp|}}} {{#ifeq: {{{process 5 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 5 cpp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 cpp|}}} {{#ifeq: {{{process 6 cpp Δ|}}} | - | | {{!}}{{!}} {{{process 6 cpp Δ|}}} }} }}
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− | | {{{process 1 mmp|}}} || {{#ifeq: {{{process 1 mmp Δ|}}} | - | | {{{process 1 mmp Δ|}}} }}<!-- | + | | {{{process 1 mmp|}}} || {{{process 1 mmp Δ|}}} || {{{process 2 mmp|}}} || {{{process 2 mmp Δ|}}} || {{{process 3 mmp|}}} || {{{process 3 mmp Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 mmp|}}} {{#ifeq: {{{process 2 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 2 mmp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 mmp|}}} {{#ifeq: {{{process 3 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 3 mmp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 mmp|}}} {{#ifeq: {{{process 4 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 4 mmp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 mmp|}}} {{#ifeq: {{{process 5 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 5 mmp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 mmp|}}} {{#ifeq: {{{process 6 mmp Δ|}}} | - | | {{!}}{{!}} {{{process 6 mmp Δ|}}} }} }}
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− | | {{{process 1 sram hp|}}} || {{#ifeq: {{{process 1 sram hp Δ|}}} | - | | {{{process 1 sram hp Δ|}}} }}<!-- | + | | {{{process 1 sram hp|}}} || {{{process 1 sram hp Δ|}}} || {{{process 2 sram hp|}}} || {{{process 2 sram hp Δ|}}} || {{{process 3 sram hp|}}} || {{{process 3 sram hp Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hp|}}} {{#ifeq: {{{process 2 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hp|}}} {{#ifeq: {{{process 3 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram hp|}}} {{#ifeq: {{{process 4 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram hp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram hp|}}} {{#ifeq: {{{process 5 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram hp Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hp|}}} {{#ifeq: {{{process 6 sram hp Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hp Δ|}}} }} }}
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− | | {{{process 1 sram hd|}}} || {{#ifeq: {{{process 1 sram hd Δ|}}} | - | | {{{process 1 sram hd Δ|}}} }}<!-- | + | | {{{process 1 sram hd|}}} || {{{process 1 sram hd Δ|}}} || {{{process 2 sram hd|}}} || {{{process 2 sram hd Δ|}}} || {{{process 3 sram hd|}}} || {{{process 3 sram hd Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram hd|}}} {{#ifeq: {{{process 2 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram hd Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram hd|}}} {{#ifeq: {{{process 3 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram hd Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram hd|}}} {{#ifeq: {{{process 4 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram hd Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram hd|}}} {{#ifeq: {{{process 5 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram hd Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram hd|}}} {{#ifeq: {{{process 6 sram hd Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram hd Δ|}}} }} }}
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− | | {{{process 1 sram lv|}}} || {{#ifeq: {{{process 1 sram lv Δ|}}} | - | | {{{process 1 sram lv Δ|}}} }}<!-- | + | | {{{process 1 sram lv|}}} || {{{process 1 sram lv Δ|}}} || {{{process 2 sram lv|}}} || {{{process 2 sram lv Δ|}}} || {{{process 3 sram lv|}}} || {{{process 3 sram lv Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 sram lv|}}} {{#ifeq: {{{process 2 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 2 sram lv Δ|}}} }} }}<!--
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− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 sram lv|}}} {{#ifeq: {{{process 3 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 3 sram lv Δ|}}} }} }}<!--
| |
− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 sram lv|}}} {{#ifeq: {{{process 4 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 4 sram lv Δ|}}} }} }}<!--
| |
− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 sram lv|}}} {{#ifeq: {{{process 5 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 5 sram lv Δ|}}} }} }}<!--
| |
− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 sram lv|}}} {{#ifeq: {{{process 6 sram lv Δ|}}} | - | | {{!}}{{!}} {{{process 6 sram lv Δ|}}} }} }}
| |
| |- | | |- |
− | | {{{process 1 dram|}}} || {{#ifeq: {{{process 1 dram Δ|}}} | - | | {{{process 1 dram Δ|}}} }}<!-- | + | | {{{process 1 dram|}}} || {{{process 1 dram Δ|}}} || {{{process 2 dram|}}} || {{{process 2 dram Δ|}}} || {{{process 3 dram|}}} || {{{process 3 dram Δ|}}} |
− | -->{{#if: {{{process 2 fab|}}}| {{!}}{{!}} {{{process 2 dram|}}} {{#ifeq: {{{process 2 dram Δ|}}} | - | | {{!}}{{!}} {{{process 2 dram Δ|}}} }} }}<!--
| |
− | -->{{#if: {{{process 3 fab|}}}| {{!}}{{!}} {{{process 3 dram|}}} {{#ifeq: {{{process 3 dram Δ|}}} | - | | {{!}}{{!}} {{{process 3 dram Δ|}}} }} }}<!--
| |
− | -->{{#if: {{{process 4 fab|}}}| {{!}}{{!}} {{{process 4 dram|}}} {{#ifeq: {{{process 4 dram Δ|}}} | - | | {{!}}{{!}} {{{process 4 dram Δ|}}} }} }}<!--
| |
− | -->{{#if: {{{process 5 fab|}}}| {{!}}{{!}} {{{process 5 dram|}}} {{#ifeq: {{{process 5 dram Δ|}}} | - | | {{!}}{{!}} {{{process 5 dram Δ|}}} }} }}<!--
| |
− | -->{{#if: {{{process 6 fab|}}}| {{!}}{{!}} {{{process 6 dram|}}} {{#ifeq: {{{process 6 dram Δ|}}} | - | | {{!}}{{!}} {{{process 6 dram Δ|}}} }} }}
| |
| |} | | |} |
| </div> | | </div> |