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| {{lithography processes}} | | {{lithography processes}} |
− | The '''90 nanometer (90 nm) lithography process''' is a [[technology node|full node]] semiconductor manufacturing process following the [[110 nm lithography process|110 nm process]] stopgap. Commercial [[integrated circuit]] manufacturing using 90 nm process began in 2003. This technology was superseded by the [[80 nm lithography process|80 nm process]] (HN) / [[65 nm lithography process|65 nm process]] (FN) in 2006. | + | The '''90 nm lithography process''' is a [[technology node|full node]] semiconductor manufacturing process following the [[110 nm lithography process|110 nm process]] stopgap. Commercial [[integrated circuit]] manufacturing using 90 nm process began in 2004. This technology was superseded by the [[80 nm lithography process|80 nm process]] (HN) / [[65 nm lithography process|65 nm process]] (FN) in 2006. |
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| == Industry == | | == Industry == |
− | Introduced in late 2002, Intel's 90 nm process became the first volume production to introduce [[strained silicon]] transistors.
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− | {{scrolling table/top|style=text-align: right; | first=Fab
| + | === Intel === |
− | |Process Name
| + | {| class="wikitable" |
− | |1st Production
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− | |Type
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− | |Wafer
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− | |Metal Layers
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− | |
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− | |Contacted Gate Pitch
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− | |Interconnect Pitch (M1P)
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− | |SRAM bit cell
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− | |DRAM bit cell
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− | }}
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− | {{scrolling table/mid}}
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− | |-
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− | ! colspan="2" | [[Intel]] !! colspan="2" | [[TSMC]] !! colspan="2" | [[Samsung]] !! colspan="2" | [[Fujitsu]] || colspan="2" | [[IBM]] / [[Toshiba]] / [[Sony]] / [[AMD]] / [[Chartered]] !! colspan="2" | [[Motorola]] !! colspan="2" | [[TI]]
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− | |- style="text-align: center;"
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− | | colspan="2" | P1262 || colspan="2" | || colspan="2" | || colspan="2" | CS-100 / CS-101 || colspan="2" | || colspan="2" | HiPerMOS 8 || colspan="2" |
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− | |- style="text-align: center;" | |
− | | colspan="2" | 2002 || colspan="2" | 2003 || colspan="2" | 2003 || colspan="2" | 2004 || colspan="2" | 2003 || colspan="2" | 2004 || colspan="2" | 2005
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− | |- style="text-align: center;"
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− | | colspan="8" | Bulk || colspan="4" | PDSOI || colspan="2" | Bulk
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− | |- style="text-align: center;"
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− | | colspan="14" | 300mm
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− | |- style="text-align: center;"
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− | | colspan="2" | 7 || colspan="2" | || colspan="2" | || colspan="2" | 10 || colspan="2" | || colspan="2" | || colspan="2" | 9
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− | |-
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− | ! Value !! [[130 nm]] Δ !! Value !! [[130 nm]] Δ !! Value !! [[130 nm]] Δ !! Value !! [[130 nm]] Δ !! Value !! [[130 nm]] Δ !! Value !! [[130 nm]] Δ !! Value !! [[130 nm]] Δ
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| |- | | |- |
− | | 260 nm || 0.82x || 240 nm || 0.77x || 245 nm || 0.70x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x | + | | || Measurement || Scaling from [[130 nm]] |
| |- | | |- |
− | | 220 nm || 0.63x || 240 nm || 0.71x || 245 nm || 0.70x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x | + | | Contacted Gate Pitch || 260 nm || 0.82x |
| |- | | |- |
− | | 1.0 µm² || 0.50x || 0.999 µm² || 0.47x || 0.999 µm² || ?x || 1.07 µm² || 0.54x || 0.999 µm² || ?x || ? µm² || ?x || ? µm² || ?x | + | | Interconnect Pitch (M1P) || 220 nm || 0.63x |
| |- | | |- |
− | | || || || || 0.275 µm² || || || || 0.19 µm² || ?x || || || || | + | | [[SRAM]] bit cell || 1.0 µm<sup>2</sup> || 0.50x |
− | {{scrolling table/end}}
| + | |} |
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| == 90 nm Microprocessors== | | == 90 nm Microprocessors== |
− | * AMD
| + | {{expand list}} |
− | ** {{amd|Athlon 64}}
| + | |
− | ** {{amd|Athlon 64 X2}}
| + | == 90 nm System on Chips== |
− | ** {{amd|FX}}
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− | ** {{amd|Opteron}}
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− | ** {{amd|Turion 64}}
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− | ** {{amd|Turion 64 X2}}
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− | * Cavium
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− | ** {{cavium|OCTEON Plus}}
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− | * HAL (Fujitsu)
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− | ** {{hal|SPARC64 V}}
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− | * IBM
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− | ** {{ibm|PowerPC 970}}
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− | * Loongson
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− | ** {{loongson|Godson 2}}
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− | * Qualcomm
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− | ** {{qualcomm|MSM6xxx}}
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− | * Sun
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− | ** {{sun|UltraSPARC T1}}
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− | * Intel
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− | ** {{intel|Pentium 4 Extreme Edition}}
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− | ** {{intel|Pentium M}}
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− | ** {{intel|Pentium D}}
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− | ** {{intel|EP80579}}
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− | * STMicroelectronics
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− | ** STM32 F4
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− | ** STM32 F7
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− | ** STM32 G0
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− | ** STM32 G4
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| {{expand list}} | | {{expand list}} |
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| == 90 nm Microarchitectures == | | == 90 nm Microarchitectures == |
− | * AMD
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− | ** {{amd|K8|l=arch}}
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− | * ARM
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− | ** {{armh|ARM7|l=arch}}
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− | * IBM
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− | ** {{ibm|z9|l=arch}}
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− | * Intel
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− | ** {{intel|Pentium M|l=arch}}
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− | * VIA Technologies
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− | ** {{via|Esther|l=arch}}
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| {{expand list}} | | {{expand list}} |
− |
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− | == Documents ==
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− | * [[:File:samsung foundry - 45, 65, 90 (August, 2007).pdf|Samsung foundry - 45 nm, 65 nm, 90 nm guide (August, 2007)]]
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− | [[category:lithography]]
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