The 65 nm lithography process is a full node semiconductor manufacturing process following the 80 nm process stopgap. Commercial integrated circuit manufacturing using 65 nm process began in 2006. This technology was superseded by the 55 nm process (HN) / 45 nm process (FN) in 2007.

Industry

Intel

	Measurement	Scaling from 90 nm
Contacted Gate Pitch	220 nm	0.85x
Interconnect Pitch (M1P)	210 nm	0.95x
SRAM bit cell	0.570 µm2	0.61x

Design Rules
Layer	Pitch	Thick	Aspect Ratio
Isolation	220 nm	320 nm	-
Polysilicon	220 nm	90 nm	-
Contacted Gate	220 nm		-
Metal 1	210 nm	170 nm	1.6
Metal 2	210 nm	190 nm	1.8
Metal 3	220 nm	200 nm	1.8
Metal 4	280 nm	250 nm	1.8
Metal 5	330 nm	300 nm	1.8
Metal 6	480 nm	430 nm	1.8
Metal 7	720 nm	650 nm	1.8
Metal 8	1.80 µm	975 nm	1.8

65 nm Microprocessors

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65 nm System on Chips

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65 nm Microarchitectures

• Intel
  • Core

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