https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&feed=atom&action=history
equivalent oxide thickness - Revision history
2024-03-28T23:31:33Z
Revision history for this page on the wiki
MediaWiki 1.28.1
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=100255&oldid=prev
David: Undo revision 100231 by 128.253.198.222 (talk) that broke the equation
2022-07-04T17:27:17Z
<p>Undo revision 100231 by <a href="/wiki/Special:Contributions/128.253.198.222" title="Special:Contributions/128.253.198.222">128.253.198.222</a> (<a href="/w/index.php?title=User_talk:128.253.198.222&action=edit&redlink=1" class="new" title="User talk:128.253.198.222 (page does not exist)">talk</a>) that broke the equation</p>
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<td colspan='2' style="background-color: white; color:black; text-align: center;">← Older revision</td>
<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 17:27, 4 July 2022</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l22" >Line 22:</td>
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<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 6.15 nm  in thickness [[Hafnium Dioxide]] (HfO<sub>2</sub>) would result in an equivalent SiO<sub>2</sub> oxide thickness of around <del class="diffchange diffchange-inline">37.83nm. </del><math>t_{ox} = \frac{<del class="diffchange diffchange-inline">\</del>24}{<del class="diffchange diffchange-inline">\</del>3.9}6.15\text{ nm} = <del class="diffchange diffchange-inline">37.83</del>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 6.15 nm  in thickness [[Hafnium Dioxide]] (HfO<sub>2</sub>) would result in an equivalent SiO<sub>2</sub> oxide thickness of around <math>t_{ox} = \frac{24}{3.9}6.15\text{ nm} = <ins class="diffchange diffchange-inline">1</ins>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td></tr>
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David
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=100231&oldid=prev
128.253.198.222 at 15:40, 23 June 2022
2022-06-23T15:40:14Z
<p></p>
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<td colspan='2' style="background-color: white; color:black; text-align: center;">← Older revision</td>
<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 15:40, 23 June 2022</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l22" >Line 22:</td>
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<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 6.15 nm  in thickness [[Hafnium Dioxide]] (HfO<sub>2</sub>) would result in an equivalent SiO<sub>2</sub> oxide thickness of around <math>t_{ox} = \frac{24}{3.9}6.15\text{ nm} = <del class="diffchange diffchange-inline">1</del>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 6.15 nm  in thickness [[Hafnium Dioxide]] (HfO<sub>2</sub>) would result in an equivalent SiO<sub>2</sub> oxide thickness of around <ins class="diffchange diffchange-inline">37.83nm. </ins><math>t_{ox} = \frac{<ins class="diffchange diffchange-inline">\</ins>24}{<ins class="diffchange diffchange-inline">\</ins>3.9}6.15\text{ nm} = <ins class="diffchange diffchange-inline">37.83</ins>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td></tr>
</table>
128.253.198.222
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=100230&oldid=prev
128.253.198.222: Calculation reversed dielectric constants of HfOx and SiOx
2022-06-23T15:37:18Z
<p>Calculation reversed dielectric constants of HfOx and SiOx</p>
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<td colspan='2' style="background-color: white; color:black; text-align: center;">← Older revision</td>
<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 15:37, 23 June 2022</td>
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<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 6.15 nm  in thickness [[Hafnium Dioxide]] (HfO<sub>2</sub>) would result in an equivalent SiO<sub>2</sub> oxide thickness of around <math>t_{ox} = \frac{3.9<del class="diffchange diffchange-inline">}{24</del>}6.15\text{ nm} = 1\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 6.15 nm  in thickness [[Hafnium Dioxide]] (HfO<sub>2</sub>) would result in an equivalent SiO<sub>2</sub> oxide thickness of around <math>t_{ox} = \frac<ins class="diffchange diffchange-inline">{24}</ins>{3.9}6.15\text{ nm} = 1\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td></tr>
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128.253.198.222
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=98582&oldid=prev
131.179.156.14 at 17:37, 28 February 2021
2021-02-28T17:37:59Z
<p></p>
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<td colspan='2' style="background-color: white; color:black; text-align: center;">← Older revision</td>
<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 17:37, 28 February 2021</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l11" >Line 11:</td>
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<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Where <math>A\epsilon_r</math> is the relative [[dielectric constant]] of SiO<sub>2</sub> in our case. Therefore one calculate the equivalent oxide thickness as,</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Where <math>A\epsilon_r</math> is the relative [[dielectric constant]] of SiO<sub>2</sub> in our case. Therefore one calculate the equivalent oxide thickness as,</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>:: <math>\frac{A\epsilon_{SiO2}\epsilon_0}{t_{ox}} = \frac{A\epsilon_{high-\kappa}\epsilon_0}{t_{<del class="diffchange diffchange-inline">oxe</del>}}</math></div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>:: <math>\frac{A\epsilon_{SiO2}\epsilon_0}{t_{ox}} = \frac{A\epsilon_{high-\kappa}\epsilon_0}{t_{<ins class="diffchange diffchange-inline">ox-high-\kappa</ins>}}</math></div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{<del class="diffchange diffchange-inline">oxe</del>} = \frac{\cancel{A}\epsilon_{high-\kappa}\cancel{\epsilon_0}}{\cancel{A}\epsilon_{SiO2}\cancel{\epsilon_0}}t_{ox} = \frac{\epsilon_{high-\kappa}}{\epsilon_{SiO2}}t_{ox}</math></div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{<ins class="diffchange diffchange-inline">ox-high-\kappa</ins>} = \frac{\cancel{A}\epsilon_{high-\kappa}\cancel{\epsilon_0}}{\cancel{A}\epsilon_{SiO2}\cancel{\epsilon_0}}t_{ox} = \frac{\epsilon_{high-\kappa}}{\epsilon_{SiO2}}t_{ox}</math></div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Note that the dielectric constant SiO<sub>2</sub> is 3.9</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Note that the dielectric constant SiO<sub>2</sub> is 3.9</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{<del class="diffchange diffchange-inline">oxe</del>} = \frac{\epsilon_{high-\kappa}}{3.9}t_{ox}</math></div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{<ins class="diffchange diffchange-inline">ox-high-\kappa</ins>} = \frac{\epsilon_{high-\kappa}}{3.9}t_{ox}</math></div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Where <code>t<sub>oxe</sub></code> is the equivalent oxide thickness, <code>ε<sub>high-κ</sub></code> is the [[dielectric constant]] of the [[high-κ]] material used, and <code>t<sub>ox</sub></code> is the physical oxide layer thickness.</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Where <code>t<sub>oxe</sub></code> is the equivalent oxide thickness, <code>ε<sub>high-κ</sub></code> is the [[dielectric constant]] of the [[high-κ]] material used, and <code>t<sub>ox</sub></code> is the physical oxide layer thickness.</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just <del class="diffchange diffchange-inline">1 </del>nm in thickness would result in an equivalent oxide thickness of around <math>t_{<del class="diffchange diffchange-inline">oxe</del>} = \frac<del class="diffchange diffchange-inline">{24}</del>{3.9}<del class="diffchange diffchange-inline">1</del>\text{ nm} = <del class="diffchange diffchange-inline">6.15</del>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just <ins class="diffchange diffchange-inline">6.15 </ins>nm <ins class="diffchange diffchange-inline"> </ins>in thickness <ins class="diffchange diffchange-inline">[[Hafnium Dioxide]] (HfO<sub>2</sub>) </ins>would result in an equivalent <ins class="diffchange diffchange-inline">SiO<sub>2</sub> </ins>oxide thickness of around <math>t_{<ins class="diffchange diffchange-inline">ox</ins>} = \frac{3.9}<ins class="diffchange diffchange-inline">{24}6.15</ins>\text{ nm} = <ins class="diffchange diffchange-inline">1</ins>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td></tr>
</table>
131.179.156.14
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=98581&oldid=prev
131.179.156.14 at 17:31, 28 February 2021
2021-02-28T17:31:58Z
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<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 17:31, 28 February 2021</td>
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<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>{{title|Equivalent Oxide Thickness (EOT)}}{{confuse|oxide thickness|l1=Oxide Thickness (t<sub>OX</sub>)}}</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>{{title|Equivalent Oxide Thickness (EOT)}}{{confuse|oxide thickness|l1=Oxide Thickness (t<sub>OX</sub>)}}</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>'''Equivalent Oxide Thickness''' ('''EOT'''), represented by <code>t<sub>eq</sub></code> or <code>t<sub><del class="diffchange diffchange-inline">OXE</del></sub></code>, is the [[gate oxide thickness]] of the SiO<sub>2</sub> layer of a [[transistor]] that would be required to achieve similar capacitance density as the [[high-κ]] material used.</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>'''Equivalent Oxide Thickness''' ('''EOT'''), represented by <code>t<sub>eq</sub></code> or <code>t<sub><ins class="diffchange diffchange-inline">OX</ins></sub></code>, is the [[gate oxide thickness]] of the SiO<sub>2</sub> layer of a [[transistor]] that would be required to achieve similar capacitance density as the [[high-κ]] material used.</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>A [[gate dielectric]] with a [[dielectric constant]] that is substantially higher than that of SiO<sub>2</sub> will initially have a much smaller equivalent electrical thickness. This key feature allowed for the industry to continue on with [[Moore's Law]]. As the semiconductor industry began to experiment with transitioning from a SiO<sub>2</sub> gate oxide to a [[high-κ]] material, EOT can be used to quickly compare those materials using existing SiO<sub>2</sub>-based models.</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>A [[gate dielectric]] with a [[dielectric constant]] that is substantially higher than that of SiO<sub>2</sub> will initially have a much smaller equivalent electrical thickness. This key feature allowed for the industry to continue on with [[Moore's Law]]. As the semiconductor industry began to experiment with transitioning from a SiO<sub>2</sub> gate oxide to a [[high-κ]] material, EOT can be used to quickly compare those materials using existing SiO<sub>2</sub>-based models.</div></td></tr>
</table>
131.179.156.14
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=83390&oldid=prev
David: Reverted edits by 14.139.125.73 (talk) to last revision by Inject
2018-10-17T03:34:36Z
<p>Reverted edits by <a href="/wiki/Special:Contributions/14.139.125.73" title="Special:Contributions/14.139.125.73">14.139.125.73</a> (<a href="/w/index.php?title=User_talk:14.139.125.73&action=edit&redlink=1" class="new" title="User talk:14.139.125.73 (page does not exist)">talk</a>) to last revision by <a href="/wiki/User:Inject" title="User:Inject">Inject</a></p>
<table class="diff diff-contentalign-left" data-mw="interface">
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<td colspan='2' style="background-color: white; color:black; text-align: center;">← Older revision</td>
<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 03:34, 17 October 2018</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l22" >Line 22:</td>
<td colspan="2" class="diff-lineno">Line 22:</td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 1 nm in thickness would result in an equivalent oxide thickness of around <math>t_{oxe} = \frac{3.9<del class="diffchange diffchange-inline">}{24</del>}1\text{ nm} = <del class="diffchange diffchange-inline">0</del>.<del class="diffchange diffchange-inline">1625</del>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 1 nm in thickness would result in an equivalent oxide thickness of around <math>t_{oxe} = \frac<ins class="diffchange diffchange-inline">{24}</ins>{3.9}1\text{ nm} = <ins class="diffchange diffchange-inline">6</ins>.<ins class="diffchange diffchange-inline">15</ins>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td></tr>
</table>
David
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=83378&oldid=prev
14.139.125.73: /* Example */
2018-10-16T14:01:15Z
<p><span dir="auto"><span class="autocomment">Example</span></span></p>
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<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 14:01, 16 October 2018</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l22" >Line 22:</td>
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<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Example ==</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 1 nm in thickness would result in an equivalent oxide thickness of around <math>t_{oxe} = \frac<del class="diffchange diffchange-inline">{24}</del>{3.9}1\text{ nm} = <del class="diffchange diffchange-inline">6</del>.<del class="diffchange diffchange-inline">15</del>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 1 nm in thickness would result in an equivalent oxide thickness of around <math>t_{oxe} = \frac{3.9<ins class="diffchange diffchange-inline">}{24</ins>}1\text{ nm} = <ins class="diffchange diffchange-inline">0</ins>.<ins class="diffchange diffchange-inline">1625</ins>\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</div></td></tr>
</table>
14.139.125.73
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=43024&oldid=prev
Inject: /* Equation */
2017-05-23T19:21:49Z
<p><span dir="auto"><span class="autocomment">Equation</span></span></p>
<table class="diff diff-contentalign-left" data-mw="interface">
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<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 19:21, 23 May 2017</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l11" >Line 11:</td>
<td colspan="2" class="diff-lineno">Line 11:</td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Where <math>A\epsilon_r</math> is the relative [[dielectric constant]] of SiO<sub>2</sub> in our case. Therefore one calculate the equivalent oxide thickness as,</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Where <math>A\epsilon_r</math> is the relative [[dielectric constant]] of SiO<sub>2</sub> in our case. Therefore one calculate the equivalent oxide thickness as,</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>:: <math>\frac{A\epsilon_{SiO2}\epsilon_0}{t_{ox}} = \frac{A\epsilon_{high-<del class="diffchange diffchange-inline">κ</del>}\epsilon_0}{t_{oxe}}</math></div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>:: <math>\frac{A\epsilon_{SiO2}\epsilon_0}{t_{ox}} = \frac{A\epsilon_{high-<ins class="diffchange diffchange-inline">\kappa</ins>}\epsilon_0}{t_{oxe}}</math></div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>:: <math><del class="diffchange diffchange-inline">\require{cancel}</del>t_{oxe} = \frac{\cancel{A}\epsilon_{high-<del class="diffchange diffchange-inline">κ</del>}\cancel{\epsilon_0}}{\cancel{A}\epsilon_{SiO2}\cancel{\epsilon_0}}t_{ox} = \frac{\epsilon_{high-<del class="diffchange diffchange-inline">κ</del>}}{\epsilon_{SiO2}}t_{ox}</math></div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{oxe} = \frac{\cancel{A}\epsilon_{high-<ins class="diffchange diffchange-inline">\kappa</ins>}\cancel{\epsilon_0}}{\cancel{A}\epsilon_{SiO2}\cancel{\epsilon_0}}t_{ox} = \frac{\epsilon_{high-<ins class="diffchange diffchange-inline">\kappa</ins>}}{\epsilon_{SiO2}}t_{ox}</math></div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Note that the dielectric constant SiO<sub>2</sub> is 3.9</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Note that the dielectric constant SiO<sub>2</sub> is 3.9</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{oxe} = \frac{\epsilon_{high-<del class="diffchange diffchange-inline">κ</del>}}{3.9}t_{ox}</math></div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{oxe} = \frac{\epsilon_{high-<ins class="diffchange diffchange-inline">\kappa</ins>}}{3.9}t_{ox}</math></div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Where <code>t<sub>oxe</sub></code> is the equivalent oxide thickness, <code>ε<sub>high-κ</sub></code> is the [[dielectric constant]] of the [[high-κ]] material used, and <code>t<sub>ox</sub></code> is the physical oxide layer thickness.</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>Where <code>t<sub>oxe</sub></code> is the equivalent oxide thickness, <code>ε<sub>high-κ</sub></code> is the [[dielectric constant]] of the [[high-κ]] material used, and <code>t<sub>ox</sub></code> is the physical oxide layer thickness.</div></td></tr>
</table>
Inject
https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=43006&oldid=prev
Inject at 03:43, 23 May 2017
2017-05-23T03:43:09Z
<p></p>
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<td colspan='2' style="background-color: white; color:black; text-align: center;">← Older revision</td>
<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 03:43, 23 May 2017</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l2" >Line 2:</td>
<td colspan="2" class="diff-lineno">Line 2:</td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>'''Equivalent Oxide Thickness''' ('''EOT'''), represented by <code>t<sub>eq</sub></code> or <code>t<sub>OXE</sub></code>, is the [[gate oxide thickness]] of the SiO<sub>2</sub> layer of a [[transistor]] that would be required to achieve similar capacitance density as the [[high-κ]] material used.</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>'''Equivalent Oxide Thickness''' ('''EOT'''), represented by <code>t<sub>eq</sub></code> or <code>t<sub>OXE</sub></code>, is the [[gate oxide thickness]] of the SiO<sub>2</sub> layer of a [[transistor]] that would be required to achieve similar capacitance density as the [[high-κ]] material used.</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>A [[gate dielectric]] with a [[dielectric constant]] that is substantially higher than that of SiO<sub>2</sub> will initially have a much smaller equivalent electrical thickness. As the semiconductor industry began to experiment with transitioning from a SiO<sub>2</sub> gate oxide to a [[high-κ]] material, EOT can be used to quickly compare those materials using existing SiO<sub>2</sub>-based models.</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>A [[gate dielectric]] with a [[dielectric constant]] that is substantially higher than that of SiO<sub>2</sub> will initially have a much smaller equivalent electrical thickness<ins class="diffchange diffchange-inline">. This key feature allowed for the industry to continue on with [[Moore's Law]]</ins>. As the semiconductor industry began to experiment with transitioning from a SiO<sub>2</sub> gate oxide to a [[high-κ]] material, EOT can be used to quickly compare those materials using existing SiO<sub>2</sub>-based models.</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Equation ==</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>== Equation ==</div></td></tr>
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https://en.wikichip.org/w/index.php?title=equivalent_oxide_thickness&diff=43000&oldid=prev
Inject at 03:30, 23 May 2017
2017-05-23T03:30:34Z
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<td colspan='2' style="background-color: white; color:black; text-align: center;">← Older revision</td>
<td colspan='2' style="background-color: white; color:black; text-align: center;">Revision as of 03:30, 23 May 2017</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l4" >Line 4:</td>
<td colspan="2" class="diff-lineno">Line 4:</td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>A [[gate dielectric]] with a [[dielectric constant]] that is substantially higher than that of SiO<sub>2</sub> will initially have a much smaller equivalent electrical thickness. As the semiconductor industry began to experiment with transitioning from a SiO<sub>2</sub> gate oxide to a [[high-κ]] material, EOT can be used to quickly compare those materials using existing SiO<sub>2</sub>-based models.</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>A [[gate dielectric]] with a [[dielectric constant]] that is substantially higher than that of SiO<sub>2</sub> will initially have a much smaller equivalent electrical thickness. As the semiconductor industry began to experiment with transitioning from a SiO<sub>2</sub> gate oxide to a [[high-κ]] material, EOT can be used to quickly compare those materials using existing SiO<sub>2</sub>-based models.</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td colspan="2"> </td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">== Equation ==</ins></div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>One can treat [[MOSFET]] behavior like two parallel plate capacitors,</div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>One can treat [[MOSFET]] behavior like two parallel plate capacitors,</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l17" >Line 17:</td>
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<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{oxe} = \frac{\epsilon_{high-κ}}{3.9}t_{ox}</math></div></td><td class='diff-marker'> </td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>:: <math>t_{oxe} = \frac{\epsilon_{high-κ}}{3.9}t_{ox}</math></div></td></tr>
<tr><td colspan="2"> </td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;"></ins></div></td></tr>
<tr><td colspan="2"> </td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">Where <code>t<sub>oxe</sub></code> is the equivalent oxide thickness, <code>ε<sub>high-κ</sub></code> is the [[dielectric constant]] of the [[high-κ]] material used, and <code>t<sub>ox</sub></code> is the physical oxide layer thickness.</ins></div></td></tr>
<tr><td colspan="2"> </td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;"></ins></div></td></tr>
<tr><td colspan="2"> </td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">== Example ==</ins></div></td></tr>
<tr><td colspan="2"> </td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">For example, consider [[Hafnium Dioxide]] (HfO<sub>2</sub>) which has an <math>\epsilon_r = ~24</math> (subject to variations in temperature). A layer of just 1 nm in thickness would result in an equivalent oxide thickness of around <math>t_{oxe} = \frac{24}{3.9}1\text{ nm} = 6.15\text{ nm}</math>. This is indeed the material used by [[Intel]] following their transition to [[high-κ]] at the [[45 nm process]] node.</ins></div></td></tr>
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