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8 µm lithography process

The 8 µm lithography process was the semiconductor process technology used by some semiconductor companies during the late 1960s through the early 1970s. This process had an effective channel length of roughly 8 µm between the source and drain (Poly-SI channel implant). The typical wafer size for this process at companies such as Fairchild and TI were 2 inch (51 mm). This process was later superseded by 6 µm, 5 µm, and 3 µm processes.


Process Name​
1st Production​
Contacted Gate Pitch​
Interconnect Pitch​
Metal Layers​
Intel TI Fairchild MOS Technology
1970 1969 1969 1974
 ? nm  ? nm  ? nm  ? nm
 ? nm  ? nm  ? nm  ? nm
2 2 2
pMOS pMOS pMOS depletion-mode nMOS
51 mm

8 µm Microprocessors

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8 µm Chips

  • Intel
    • 1103, 1Kb DRAM, worlds first commercial DRAM

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