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1 µm lithography process
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The 1 µm lithography process was the semiconductor process technology used by the major semiconductor companies between in the late 1980s. 1 µm was phased out in the early 1990s and was replaced by 800 nm, 700 nm, 650 nm, and 600 nm processes.

Industry

Fab
Process Name​
1st Production​
Technology​
 ​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell
Intel Intel HP National
HMOS-III P648 (CHMOS IV) CMOS26 BiCMOS III
1984 1987 1991 1988
nMOS CMOS CMOS BiCMOS
Value Value Value Value
 ? nm  ? nm  ? nm  ? nm
 ? nm  ? nm  ? nm  ? nm
 ? µm2 220 µm2  ? µm2  ? µm2

1 µm Microprocessors

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1 µm Microcontrollers

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1 µm Microarchitectures

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