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Difference between revisions of "1.5 µm lithography process"

(1.5 µm Microprocessors)
(Industry)
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== Industry ==
 
== Industry ==
Intel's 1.5 µm (CHMOS III; ''P646'') was done wit 125 mm wafers. A second enhanced version in 1985 was increased to a 150 mm wafer size.
 
 
{{scrolling table/top|style=text-align: right; | first=Fab
 
{{scrolling table/top|style=text-align: right; | first=Fab
 
  |Process Name
 
  |Process Name
 
  |1st Production
 
  |1st Production
| 
 
 
  |Contacted Gate Pitch
 
  |Contacted Gate Pitch
 
  |Interconnect Pitch (M1P)
 
  |Interconnect Pitch (M1P)
 +
|Metal Layers​
 
  |SRAM bit cell
 
  |SRAM bit cell
 +
|Wafer
 
}}
 
}}
 
{{scrolling table/mid}}
 
{{scrolling table/mid}}
 
|-
 
|-
! [[Intel]]  || [[Intel]]
+
! [[Intel]]  || [[Intel]] || [[HP]]
 
|- style="text-align: center;"
 
|- style="text-align: center;"
|  || P646
+
|  || P646 || NMOS III
 
|- style="text-align: center;"
 
|- style="text-align: center;"
| 1982 || 1985
+
| 1982 || 1985 || 1981
 
|-
 
|-
! Value !! Value
+
| ? nm  || ? nm  || 1.5 µm
 
|-
 
|-
| ? nm || ? nm  
+
| ? nm || ? nm || 2.5 µm
 
|-
 
|-
| ? nm || ? nm
+
|  || || 2
 
|-
 
|-
| ? µm<sup>2</sup> ||  ? µm<sup>2</sup>  
+
| ? µm<sup>2</sup> ||  ? µm<sup>2</sup> ||
 +
|-
 +
| 125 mm  || 150 mm  ||
 
{{scrolling table/end}}
 
{{scrolling table/end}}
 +
 +
=== Design Rules ===
 +
{| class="wikitable collapsible collapsed"
 +
|-
 +
! colspan="2" | HP NMOS-III Design Rules
 +
|-
 +
! Layer !! Description
 +
|-
 +
| Oxide || 450 nm thick silicon dioxide<br>1.5 µm x 1.5 µm minimum contact area, zero overlap to polysilicon, zero overlap of first metal layer
 +
|-
 +
| M1 || 1.5 µm wide line / 1.0 µm space<br>0.4 ohm/square sheet resistance
 +
|-
 +
| Intemediate Oxide || 550 nm-thick silicon dioxide<br>1.5 µm x 2.0 µm minimum contact area, zero overlap to first metal layer<br>2.0 µm overlap of second metal layer to via
 +
|-
 +
| M2 || 5.0 µm wide line / 3.0 µm space<br>0.4 ohm/square sheet resistance
 +
|}
  
 
== 1.5 µm Microprocessors ==
 
== 1.5 µm Microprocessors ==

Revision as of 09:11, 26 April 2016

The 1.5 µm lithography process was the semiconductor process technology used by the major semiconductor companies in the mid 1980s. By the late 80s this process was replaced by 1.3 µm, 1.2 µm, and 1 µm processes.

Industry

Fab
Process Name​
1st Production​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
Metal Layers​​
SRAM bit cell​
Wafer
Intel Intel HP
P646 NMOS III
1982 1985 1981
 ? nm  ? nm 1.5 µm
 ? nm  ? nm 2.5 µm
2
 ? µm2  ? µm2
125 mm 150 mm

Design Rules

1.5 µm Microprocessors

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