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Editing scaling booster
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=== Self-Aligned Contacts (SAC) === | === Self-Aligned Contacts (SAC) === | ||
{{main|self-aligned contact|l1=self-aligned contact (SAC)}} | {{main|self-aligned contact|l1=self-aligned contact (SAC)}} | ||
− | + | The node continued to shrink the various features, the landing area for the gate contacts shrunk to a point where decreasing the pitch any further would result in uneconomical yield loss. '''Self-aligned contact''' ('''SAC''') is a process enhancement technique that loosens up the alignment tolerances associated with the landing area of the [[gate contacts]], thereby allowing the contacted gate pitch to shrink further while improving the yield by preventing yield loss due to the contact shorting the gate. | |
:[[File:cpp scaling with sac.svg|400px]] | :[[File:cpp scaling with sac.svg|400px]] | ||
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=== Self-Aligned Vias (SAV) === | === Self-Aligned Vias (SAV) === | ||
{{empty section}} | {{empty section}} | ||
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=== Single Diffusion Break (SDB) === | === Single Diffusion Break (SDB) === | ||
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==== Mixed Diffusion Break (MDB) ==== | ==== Mixed Diffusion Break (MDB) ==== | ||
{{empty section}} | {{empty section}} | ||
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=== Contact Over Active Gate (COAG) === | === Contact Over Active Gate (COAG) === | ||
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=== Buried Power Rail (BPR) === | === Buried Power Rail (BPR) === | ||
{{empty section}} | {{empty section}} | ||
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=== SuperVia === | === SuperVia === | ||
SuperVia is the concept of having a Via etch through 2 metal dielectrics stack instead of landing on the bottom metal to and have another via on the bottom metal. This helps with routing concerns and improves scaling. | SuperVia is the concept of having a Via etch through 2 metal dielectrics stack instead of landing on the bottom metal to and have another via on the bottom metal. This helps with routing concerns and improves scaling. | ||
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=== Fully Self Aligned Via (FSAV) === | === Fully Self Aligned Via (FSAV) === | ||
{{empty section}} | {{empty section}} | ||
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=== Self-Aligned Block (SAB) === | === Self-Aligned Block (SAB) === | ||
{{empty section}} | {{empty section}} |