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=== NXE:3300B === | === NXE:3300B === | ||
− | + | In 2013, ASML stated shipping their first 0.33 NA machines intended for prototyping. Those were capable of 13 nm lines and spaces. They had a power source of 40 W which was later upgradable to 80 W, allowing for a throughput of up to 50 WPH (at 15 mJ/cm²). | |
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=== NXE:3400B === | === NXE:3400B === | ||
In 2017, ASML stated shipping their 3400B machines intended for [[high-volume manufacturing]]. Those were capable of 7 nm and 5 nm lines and spaces. The 3400B machines had an initial source power of 200 W which was later upgradable to 250 W and in the future over 300 W, allowing for a throughput of up to 175 WPH (at 20 mJ/cm²). | In 2017, ASML stated shipping their 3400B machines intended for [[high-volume manufacturing]]. Those were capable of 7 nm and 5 nm lines and spaces. The 3400B machines had an initial source power of 200 W which was later upgradable to 250 W and in the future over 300 W, allowing for a throughput of up to 175 WPH (at 20 mJ/cm²). | ||
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=== NXE:3400C === | === NXE:3400C === | ||
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== See also == | == See also == | ||
* [[EUVL]] | * [[EUVL]] |