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{{lithography processes}} | {{lithography processes}} | ||
− | The ''' | + | The '''65 nm lithography process''' is a [[technology node|full node]] semiconductor manufacturing process following the [[80 nm lithography process|80 nm process]] stopgap. Commercial [[integrated circuit]] manufacturing using 65 nm process began in 2005. This technology was superseded by the [[55 nm lithography process|55 nm process]] (HN) / [[45 nm lithography process|45 nm process]] (FN) in 2007. |
== Industry == | == Industry == | ||
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|Process Name | |Process Name | ||
|1st Production | |1st Production | ||
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|Contacted Gate Pitch | |Contacted Gate Pitch | ||
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|SRAM bit cell (HD) | |SRAM bit cell (HD) | ||
|SRAM bit cell (LP) | |SRAM bit cell (LP) | ||
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}} | }} | ||
{{scrolling table/mid}} | {{scrolling table/mid}} | ||
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|- style="text-align: center;" | |- style="text-align: center;" | ||
| colspan="2" | 2005 || colspan="2" | 2005 || colspan="2" | 2007 || colspan="2" | 2005 || colspan="2" | 2005 || colspan="2" | 2006 | | colspan="2" | 2005 || colspan="2" | 2005 || colspan="2" | 2007 || colspan="2" | 2005 || colspan="2" | 2005 || colspan="2" | 2006 | ||
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! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ | ! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ !! Value !! [[90 nm]] Δ | ||
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| 210 nm || 0.95x || ? nm || ?x || ? nm || ?x || 180 nm || 0.73 || 180 nm || 0.75x || ? nm || ?x | | 210 nm || 0.95x || ? nm || ?x || ? nm || ?x || 180 nm || 0.73 || 180 nm || 0.75x || ? nm || ?x | ||
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− | | 0.570 | + | | 0.570 µm<sup>2</sup> || 0.57x || 0.65 µm<sup>2</sup> || 0.65x || 0.49 µm<sup>2</sup> || || || || || || || |
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− | | || || 0. | + | | 0.680 µm<sup>2</sup> || || 0.540 µm<sup>2</sup> || || 0.490 µm<sup>2</sup> || || 0.540 µm<sup>2</sup> || || 0.525 µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x |
{{scrolling table/end}} | {{scrolling table/end}} | ||
=== Design Rules === | === Design Rules === | ||
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== 65 nm Microprocessors== | == 65 nm Microprocessors== | ||
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* Intel | * Intel | ||
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** {{intel|Pentium 4}} | ** {{intel|Pentium 4}} | ||
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** {{intel|Pentium Extreme Edition}} | ** {{intel|Pentium Extreme Edition}} | ||
** {{intel|Pentium Dual-Core}} | ** {{intel|Pentium Dual-Core}} | ||
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− | + | == 65 nm System on Chips== | |
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{{expand list}} | {{expand list}} | ||
== 65 nm Microarchitectures == | == 65 nm Microarchitectures == | ||
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* Intel | * Intel | ||
− | ** {{intel|Core | + | ** {{intel|Core (arch)|Core}} |
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{{expand list}} | {{expand list}} | ||
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