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Editing 250 nm lithography process
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== Industry == | == Industry == | ||
− | The 0.25 µm-based process entered production at [[Intel]] in 1997. Intel original 0.25 micron process was named ''P856'' or ''Process 856''. A second process, named ''P856.5'', was a 5% linear shrink of the original design rules. The shrink, which enabled a high equipment re-use resulted in a smaller, 9.26 | + | The 0.25 µm-based process entered production at [[Intel]] in 1997. Intel original 0.25 micron process was named ''P856'' or ''Process 856''. A second process, named ''P856.5'', was a 5% linear shrink of the original design rules. The shrink, which enabled a high equipment re-use resulted in a smaller, 9.26 µm<sup>2</sup>, 6T SRAM. The process used 200 mm [[wafer]]s, [[Wikipedia:SiO2|SiO<sub>2</sub>]] dielectric and [[wikipedia:polysilicon|polysilicon]] electode. It used [[wikipedia:Aluminium|Al]] inter-connects and an [[wikipedia:Silicon|Si]] channels. |
{{scrolling table/top|style=text-align: right; | first=Fab | {{scrolling table/top|style=text-align: right; | first=Fab | ||
|Process Name | |Process Name | ||
|1st Production | |1st Production | ||
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|Metal Layers | |Metal Layers | ||
| | | | ||
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{{scrolling table/mid}} | {{scrolling table/mid}} | ||
|- | |- | ||
− | ! colspan=" | + | ! colspan="2" | [[Intel]] || colspan="2" | [[IBM]] || colspan="2" | [[AMD]] || colspan="2" | [[TI]] || colspan="2" | [[DEC]] || colspan="2" | [[IDT]] || colspan="2" | [[Fujitsu]] || colspan="2" | [[TSMC]] || colspan="2" | [[Samsung]] || colspan="2" | [[Toshiba]] || colspan="2" | [[Motorola]] || colspan="2" | [[NEC]] |
|- style="text-align: center;" | |- style="text-align: center;" | ||
− | | colspan="2" | P856 | + | | colspan="2" | P856 || colspan="2" | CMOS-6X || colspan="2" | CS-44/CS44E/CS44E-Mod || colspan="2" | C07 || colspan="2" | CMOS-7 || colspan="2" | CMOS-10+ || colspan="2" | CS-70 || colspan="2" | || colspan="2" | || colspan="2" | || colspan="2" | HiPerMOS 4 || colspan="2" | |
|- style="text-align: center;" | |- style="text-align: center;" | ||
− | | colspan="2" | 1997 | + | | colspan="2" | 1997 || colspan="2" | 1997 || colspan="2" | 1998 || colspan="2" | 1999 || colspan="2" | ? || colspan="2" | ? || colspan="2" | ? || colspan="2" | ? || colspan="2" | 1998 || colspan="2" | 1998 || colspan="2" | 1997 || colspan="2" | |
|- style="text-align: center;" | |- style="text-align: center;" | ||
− | + | | colspan="2" | 5 || colspan="2" | 5 || colspan="2" | 5 || colspan="2" | || colspan="2" | || colspan="2" | || colspan="2" | || colspan="2" | || colspan="2" | || colspan="2" | 4 || colspan="2" | || colspan="2" | | |
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|- | |- | ||
− | ! Value !! [[350 nm]] | + | ! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ !! Value !! [[350 nm]] Δ |
|- | |- | ||
− | | 500 nm || 0.91x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x | + | | 500 nm || 0.91x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x |
|- | |- | ||
− | | 640 nm || 0.72x | + | | 640 nm || 0.72x || 700 nm || ?x || 880 nm || ?x || 850 nm || ?x || 840 nm || ?x || 940 nm || ?x || 900 nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x |
|- | |- | ||
− | | 10.26 | + | | 10.26 µm<sup>2</sup> || 0.57x || 8.6 µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || 10.5 µm<sup>2</sup> || ?x || 11.5 µm<sup>2</sup> || ?x || 11.2 µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || 7.56 µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || 12.77 µm<sup>2</sup> || ?x |
{{scrolling table/end}} | {{scrolling table/end}} | ||
=== Design Rules === | === Design Rules === | ||
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* MIPS | * MIPS | ||
** {{mips|R10000}}, 1997, fab'ed by NEC | ** {{mips|R10000}}, 1997, fab'ed by NEC | ||
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* Sun | * Sun | ||
** {{sun|UltraSPARC II}} | ** {{sun|UltraSPARC II}} | ||
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** {{intel|P6}} | ** {{intel|P6}} | ||
{{expand list}} | {{expand list}} | ||
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